5/4/2011	10:42:01 AM	Run aborted at 10:42 AM
5/4/2011	10:42:01 AM	Helium valve closed
5/4/2011	10:42:01 AM	H2 valve closed
5/4/2011	10:42:01 AM	BCl3 valve closed
5/4/2011	10:42:01 AM	PH3 valve closed
5/4/2011	10:42:01 AM	SiCl4 pre valve closed
5/4/2011	10:42:01 AM	SiCl4 post valve closed
5/4/2011	10:42:01 AM	Bypass valve closed
5/4/2011	10:42:01 AM	Main Vac valve closed
5/4/2011	10:42:01 AM	Bubbler valve closed
5/4/2011	10:42:01 AM	Helium MFC set to  0.000000
5/4/2011	10:42:01 AM	H2 MFC set to  0.000000
5/4/2011	10:42:01 AM	BCl3 MFC set to  0.000000
5/4/2011	10:42:01 AM	PHl3 MFC set to  0.000000
5/4/2011	10:42:01 AM	SiCl4 MFC set to  0.000000
5/4/2011	10:42:01 AM	Tube furnace set to 0
5/4/2011	11:01:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/4/2011	11:01:10 AM	Recipe started at 11:01 AM
5/4/2011	11:01:10 AM	Helium valve closed
5/4/2011	11:01:10 AM	H2 valve closed
5/4/2011	11:01:10 AM	BCl3 valve closed
5/4/2011	11:01:10 AM	PH3 valve closed
5/4/2011	11:01:10 AM	SiCl4 pre valve closed
5/4/2011	11:01:10 AM	SiCl4 post valve closed
5/4/2011	11:01:10 AM	Main Vac valve closed
5/4/2011	11:01:10 AM	Bubbler valve closed
5/4/2011	11:01:10 AM	Bypass valve opened
5/4/2011	11:01:10 AM	Helium MFC set to  0.000000
5/4/2011	11:01:10 AM	H2 MFC set to  0.000000
5/4/2011	11:01:10 AM	BCl3 MFC set to  0.000000
5/4/2011	11:01:10 AM	PHl3 MFC set to  0.000000
5/4/2011	11:01:10 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:01:10 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:01:10 AM	Tube furnace set to 0
5/4/2011	11:01:43 AM	Helium valve closed
5/4/2011	11:01:43 AM	H2 valve closed
5/4/2011	11:01:43 AM	BCl3 valve closed
5/4/2011	11:01:43 AM	PH3 valve closed
5/4/2011	11:01:43 AM	SiCl4 pre valve closed
5/4/2011	11:01:43 AM	SiCl4 post valve closed
5/4/2011	11:01:43 AM	Bubbler valve closed
5/4/2011	11:01:43 AM	Main Vac valve opened
5/4/2011	11:01:43 AM	Bypass valve opened
5/4/2011	11:01:43 AM	Helium MFC set to  0.000000
5/4/2011	11:01:43 AM	H2 MFC set to  0.000000
5/4/2011	11:01:43 AM	BCl3 MFC set to  0.000000
5/4/2011	11:01:43 AM	PHl3 MFC set to  0.000000
5/4/2011	11:01:43 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:01:43 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:01:43 AM	Tube furnace set to 0
5/4/2011	11:01:43 AM	Run finished at 11:01 AM
5/4/2011	11:01:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/4/2011	11:07:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/4/2011	11:07:52 AM	Recipe started at 11:07 AM
5/4/2011	11:07:52 AM	H2 valve closed
5/4/2011	11:07:52 AM	BCl3 valve closed
5/4/2011	11:07:52 AM	PH3 valve closed
5/4/2011	11:07:52 AM	SiCl4 pre valve closed
5/4/2011	11:07:52 AM	SiCl4 post valve closed
5/4/2011	11:07:52 AM	Main Vac valve closed
5/4/2011	11:07:52 AM	Bypass valve closed
5/4/2011	11:07:52 AM	Bubbler valve closed
5/4/2011	11:07:52 AM	Helium valve opened
5/4/2011	11:07:52 AM	Helium MFC set to  500.000000
5/4/2011	11:07:52 AM	H2 MFC set to  0.000000
5/4/2011	11:07:52 AM	BCl3 MFC set to  0.000000
5/4/2011	11:07:52 AM	PHl3 MFC set to  0.000000
5/4/2011	11:07:52 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:07:52 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:07:52 AM	Tube furnace set to 0
5/4/2011	11:09:12 AM	Helium valve closed
5/4/2011	11:09:12 AM	H2 valve closed
5/4/2011	11:09:12 AM	BCl3 valve closed
5/4/2011	11:09:12 AM	PH3 valve closed
5/4/2011	11:09:12 AM	SiCl4 pre valve closed
5/4/2011	11:09:12 AM	SiCl4 post valve closed
5/4/2011	11:09:12 AM	Main Vac valve closed
5/4/2011	11:09:12 AM	Bypass valve closed
5/4/2011	11:09:12 AM	Bubbler valve closed
5/4/2011	11:09:12 AM	Helium MFC set to  0.000000
5/4/2011	11:09:12 AM	H2 MFC set to  0.000000
5/4/2011	11:09:12 AM	BCl3 MFC set to  0.000000
5/4/2011	11:09:12 AM	PHl3 MFC set to  0.000000
5/4/2011	11:09:12 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:09:12 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:09:12 AM	Tube furnace set to 0
5/4/2011	11:09:12 AM	Run finished at 11:09 AM
5/4/2011	11:09:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/4/2011	11:10:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/4/2011	11:10:49 AM	Recipe started at 11:10 AM
5/4/2011	11:10:49 AM	Helium valve closed
5/4/2011	11:10:49 AM	H2 valve closed
5/4/2011	11:10:49 AM	BCl3 valve closed
5/4/2011	11:10:49 AM	PH3 valve closed
5/4/2011	11:10:49 AM	SiCl4 pre valve closed
5/4/2011	11:10:49 AM	SiCl4 post valve closed
5/4/2011	11:10:49 AM	Main Vac valve closed
5/4/2011	11:10:49 AM	Bubbler valve closed
5/4/2011	11:10:49 AM	Bypass valve opened
5/4/2011	11:10:49 AM	Helium MFC set to  0.000000
5/4/2011	11:10:49 AM	H2 MFC set to  0.000000
5/4/2011	11:10:49 AM	BCl3 MFC set to  0.000000
5/4/2011	11:10:49 AM	PHl3 MFC set to  0.000000
5/4/2011	11:10:49 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:10:49 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:10:49 AM	Tube furnace set to 0
5/4/2011	11:11:21 AM	Helium valve closed
5/4/2011	11:11:21 AM	H2 valve closed
5/4/2011	11:11:21 AM	BCl3 valve closed
5/4/2011	11:11:21 AM	PH3 valve closed
5/4/2011	11:11:21 AM	SiCl4 pre valve closed
5/4/2011	11:11:21 AM	SiCl4 post valve closed
5/4/2011	11:11:21 AM	Bubbler valve closed
5/4/2011	11:11:21 AM	Main Vac valve opened
5/4/2011	11:11:21 AM	Bypass valve opened
5/4/2011	11:11:21 AM	Helium MFC set to  0.000000
5/4/2011	11:11:21 AM	H2 MFC set to  0.000000
5/4/2011	11:11:21 AM	BCl3 MFC set to  0.000000
5/4/2011	11:11:21 AM	PHl3 MFC set to  0.000000
5/4/2011	11:11:21 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:11:21 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:11:21 AM	Tube furnace set to 0
5/4/2011	11:11:21 AM	Run finished at 11:11 AM
5/4/2011	11:11:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/4/2011	11:11:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/4/2011	11:11:39 AM	Recipe started at 11:11 AM
5/4/2011	11:11:39 AM	Helium valve closed
5/4/2011	11:11:39 AM	H2 valve closed
5/4/2011	11:11:39 AM	BCl3 valve closed
5/4/2011	11:11:39 AM	PH3 valve closed
5/4/2011	11:11:39 AM	SiCl4 pre valve closed
5/4/2011	11:11:39 AM	SiCl4 post valve closed
5/4/2011	11:11:39 AM	Main Vac valve closed
5/4/2011	11:11:39 AM	Bubbler valve closed
5/4/2011	11:11:39 AM	Bypass valve opened
5/4/2011	11:11:39 AM	Helium MFC set to  0.000000
5/4/2011	11:11:39 AM	H2 MFC set to  0.000000
5/4/2011	11:11:39 AM	BCl3 MFC set to  0.000000
5/4/2011	11:11:39 AM	PHl3 MFC set to  0.000000
5/4/2011	11:11:39 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:11:39 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:11:39 AM	Tube furnace set to 0
5/4/2011	11:11:39 AM	Helium valve closed
5/4/2011	11:11:39 AM	H2 valve closed
5/4/2011	11:11:39 AM	BCl3 valve closed
5/4/2011	11:11:39 AM	PH3 valve closed
5/4/2011	11:11:39 AM	SiCl4 pre valve closed
5/4/2011	11:11:39 AM	SiCl4 post valve closed
5/4/2011	11:11:39 AM	Bubbler valve closed
5/4/2011	11:11:39 AM	Main Vac valve opened
5/4/2011	11:11:39 AM	Bypass valve opened
5/4/2011	11:11:39 AM	Helium MFC set to  0.000000
5/4/2011	11:11:39 AM	H2 MFC set to  0.000000
5/4/2011	11:11:39 AM	BCl3 MFC set to  0.000000
5/4/2011	11:11:39 AM	PHl3 MFC set to  0.000000
5/4/2011	11:11:39 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:11:39 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:11:39 AM	Tube furnace set to 0
5/4/2011	11:12:39 AM	H2 valve closed
5/4/2011	11:12:39 AM	BCl3 valve closed
5/4/2011	11:12:39 AM	PH3 valve closed
5/4/2011	11:12:39 AM	SiCl4 pre valve closed
5/4/2011	11:12:39 AM	SiCl4 post valve closed
5/4/2011	11:12:39 AM	Bubbler valve closed
5/4/2011	11:12:39 AM	Helium valve opened
5/4/2011	11:12:39 AM	Main Vac valve opened
5/4/2011	11:12:39 AM	Bypass valve opened
5/4/2011	11:12:39 AM	Helium MFC set to  100.000000
5/4/2011	11:12:39 AM	H2 MFC set to  0.000000
5/4/2011	11:12:39 AM	BCl3 MFC set to  0.000000
5/4/2011	11:12:39 AM	PHl3 MFC set to  0.000000
5/4/2011	11:12:39 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:12:39 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:12:39 AM	Tube furnace set to 0
5/4/2011	11:13:40 AM	Helium valve closed
5/4/2011	11:13:40 AM	H2 valve closed
5/4/2011	11:13:40 AM	BCl3 valve closed
5/4/2011	11:13:40 AM	PH3 valve closed
5/4/2011	11:13:40 AM	SiCl4 pre valve closed
5/4/2011	11:13:40 AM	SiCl4 post valve closed
5/4/2011	11:13:40 AM	Bubbler valve closed
5/4/2011	11:13:40 AM	Main Vac valve opened
5/4/2011	11:13:40 AM	Bypass valve opened
5/4/2011	11:13:40 AM	Helium MFC set to  0.000000
5/4/2011	11:13:40 AM	H2 MFC set to  0.000000
5/4/2011	11:13:40 AM	BCl3 MFC set to  0.000000
5/4/2011	11:13:40 AM	PHl3 MFC set to  0.000000
5/4/2011	11:13:40 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:13:40 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:13:40 AM	Tube furnace set to 0
5/4/2011	11:14:40 AM	H2 valve closed
5/4/2011	11:14:40 AM	BCl3 valve closed
5/4/2011	11:14:40 AM	PH3 valve closed
5/4/2011	11:14:40 AM	SiCl4 pre valve closed
5/4/2011	11:14:40 AM	SiCl4 post valve closed
5/4/2011	11:14:40 AM	Bubbler valve closed
5/4/2011	11:14:40 AM	Helium valve opened
5/4/2011	11:14:40 AM	Main Vac valve opened
5/4/2011	11:14:40 AM	Bypass valve opened
5/4/2011	11:14:40 AM	Helium MFC set to  100.000000
5/4/2011	11:14:40 AM	H2 MFC set to  0.000000
5/4/2011	11:14:40 AM	BCl3 MFC set to  0.000000
5/4/2011	11:14:40 AM	PHl3 MFC set to  0.000000
5/4/2011	11:14:40 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:14:40 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:14:40 AM	Tube furnace set to 0
5/4/2011	11:15:40 AM	Helium valve closed
5/4/2011	11:15:40 AM	H2 valve closed
5/4/2011	11:15:40 AM	BCl3 valve closed
5/4/2011	11:15:40 AM	PH3 valve closed
5/4/2011	11:15:40 AM	SiCl4 pre valve closed
5/4/2011	11:15:40 AM	SiCl4 post valve closed
5/4/2011	11:15:40 AM	Bubbler valve closed
5/4/2011	11:15:40 AM	Main Vac valve opened
5/4/2011	11:15:40 AM	Bypass valve opened
5/4/2011	11:15:40 AM	Helium MFC set to  0.000000
5/4/2011	11:15:40 AM	H2 MFC set to  0.000000
5/4/2011	11:15:40 AM	BCl3 MFC set to  0.000000
5/4/2011	11:15:40 AM	PHl3 MFC set to  0.000000
5/4/2011	11:15:40 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:15:40 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:15:40 AM	Tube furnace set to 0
5/4/2011	11:16:40 AM	H2 valve closed
5/4/2011	11:16:40 AM	BCl3 valve closed
5/4/2011	11:16:40 AM	PH3 valve closed
5/4/2011	11:16:40 AM	SiCl4 pre valve closed
5/4/2011	11:16:40 AM	SiCl4 post valve closed
5/4/2011	11:16:40 AM	Bubbler valve closed
5/4/2011	11:16:40 AM	Helium valve opened
5/4/2011	11:16:40 AM	Main Vac valve opened
5/4/2011	11:16:40 AM	Bypass valve opened
5/4/2011	11:16:40 AM	Helium MFC set to  100.000000
5/4/2011	11:16:40 AM	H2 MFC set to  0.000000
5/4/2011	11:16:40 AM	BCl3 MFC set to  0.000000
5/4/2011	11:16:40 AM	PHl3 MFC set to  0.000000
5/4/2011	11:16:40 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:16:40 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:16:40 AM	Tube furnace set to 0
5/4/2011	11:17:40 AM	Helium valve closed
5/4/2011	11:17:40 AM	H2 valve closed
5/4/2011	11:17:40 AM	BCl3 valve closed
5/4/2011	11:17:40 AM	PH3 valve closed
5/4/2011	11:17:40 AM	SiCl4 pre valve closed
5/4/2011	11:17:40 AM	SiCl4 post valve closed
5/4/2011	11:17:40 AM	Bubbler valve closed
5/4/2011	11:17:40 AM	Main Vac valve opened
5/4/2011	11:17:40 AM	Bypass valve opened
5/4/2011	11:17:40 AM	Helium MFC set to  0.000000
5/4/2011	11:17:40 AM	H2 MFC set to  0.000000
5/4/2011	11:17:40 AM	BCl3 MFC set to  0.000000
5/4/2011	11:17:40 AM	PHl3 MFC set to  0.000000
5/4/2011	11:17:40 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:17:40 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:17:41 AM	Tube furnace set to 0
5/4/2011	11:18:41 AM	H2 valve closed
5/4/2011	11:18:41 AM	BCl3 valve closed
5/4/2011	11:18:41 AM	PH3 valve closed
5/4/2011	11:18:41 AM	SiCl4 pre valve closed
5/4/2011	11:18:41 AM	SiCl4 post valve closed
5/4/2011	11:18:41 AM	Bubbler valve closed
5/4/2011	11:18:41 AM	Helium valve opened
5/4/2011	11:18:41 AM	Main Vac valve opened
5/4/2011	11:18:41 AM	Bypass valve opened
5/4/2011	11:18:41 AM	Helium MFC set to  100.000000
5/4/2011	11:18:41 AM	H2 MFC set to  0.000000
5/4/2011	11:18:41 AM	BCl3 MFC set to  0.000000
5/4/2011	11:18:41 AM	PHl3 MFC set to  0.000000
5/4/2011	11:18:41 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:18:41 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:18:41 AM	Tube furnace set to 0
5/4/2011	11:19:41 AM	Helium valve closed
5/4/2011	11:19:41 AM	H2 valve closed
5/4/2011	11:19:41 AM	BCl3 valve closed
5/4/2011	11:19:41 AM	PH3 valve closed
5/4/2011	11:19:41 AM	SiCl4 pre valve closed
5/4/2011	11:19:41 AM	SiCl4 post valve closed
5/4/2011	11:19:41 AM	Bubbler valve closed
5/4/2011	11:19:41 AM	Main Vac valve opened
5/4/2011	11:19:41 AM	Bypass valve opened
5/4/2011	11:19:41 AM	Helium MFC set to  0.000000
5/4/2011	11:19:41 AM	H2 MFC set to  0.000000
5/4/2011	11:19:41 AM	BCl3 MFC set to  0.000000
5/4/2011	11:19:41 AM	PHl3 MFC set to  0.000000
5/4/2011	11:19:41 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:19:41 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:19:41 AM	Tube furnace set to 0
5/4/2011	11:20:41 AM	H2 valve closed
5/4/2011	11:20:41 AM	BCl3 valve closed
5/4/2011	11:20:41 AM	PH3 valve closed
5/4/2011	11:20:41 AM	SiCl4 pre valve closed
5/4/2011	11:20:41 AM	SiCl4 post valve closed
5/4/2011	11:20:41 AM	Bubbler valve closed
5/4/2011	11:20:41 AM	Helium valve opened
5/4/2011	11:20:41 AM	Main Vac valve opened
5/4/2011	11:20:41 AM	Bypass valve opened
5/4/2011	11:20:41 AM	Helium MFC set to  100.000000
5/4/2011	11:20:41 AM	H2 MFC set to  0.000000
5/4/2011	11:20:41 AM	BCl3 MFC set to  0.000000
5/4/2011	11:20:41 AM	PHl3 MFC set to  0.000000
5/4/2011	11:20:41 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:20:41 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:20:41 AM	Tube furnace set to 0
5/4/2011	11:21:41 AM	Helium valve closed
5/4/2011	11:21:41 AM	H2 valve closed
5/4/2011	11:21:41 AM	BCl3 valve closed
5/4/2011	11:21:41 AM	PH3 valve closed
5/4/2011	11:21:41 AM	SiCl4 pre valve closed
5/4/2011	11:21:41 AM	SiCl4 post valve closed
5/4/2011	11:21:41 AM	Bubbler valve closed
5/4/2011	11:21:41 AM	Main Vac valve opened
5/4/2011	11:21:41 AM	Bypass valve opened
5/4/2011	11:21:41 AM	Helium MFC set to  0.000000
5/4/2011	11:21:41 AM	H2 MFC set to  0.000000
5/4/2011	11:21:41 AM	BCl3 MFC set to  0.000000
5/4/2011	11:21:41 AM	PHl3 MFC set to  0.000000
5/4/2011	11:21:41 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:21:41 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:21:41 AM	Tube furnace set to 0
5/4/2011	11:22:41 AM	H2 valve closed
5/4/2011	11:22:41 AM	BCl3 valve closed
5/4/2011	11:22:41 AM	PH3 valve closed
5/4/2011	11:22:41 AM	SiCl4 pre valve closed
5/4/2011	11:22:41 AM	SiCl4 post valve closed
5/4/2011	11:22:41 AM	Bubbler valve closed
5/4/2011	11:22:41 AM	Helium valve opened
5/4/2011	11:22:41 AM	Main Vac valve opened
5/4/2011	11:22:41 AM	Bypass valve opened
5/4/2011	11:22:41 AM	Helium MFC set to  100.000000
5/4/2011	11:22:41 AM	H2 MFC set to  0.000000
5/4/2011	11:22:41 AM	BCl3 MFC set to  0.000000
5/4/2011	11:22:41 AM	PHl3 MFC set to  0.000000
5/4/2011	11:22:41 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:22:41 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:22:42 AM	Tube furnace set to 0
5/4/2011	11:23:42 AM	Helium valve closed
5/4/2011	11:23:42 AM	H2 valve closed
5/4/2011	11:23:42 AM	BCl3 valve closed
5/4/2011	11:23:42 AM	PH3 valve closed
5/4/2011	11:23:42 AM	SiCl4 pre valve closed
5/4/2011	11:23:42 AM	SiCl4 post valve closed
5/4/2011	11:23:42 AM	Bubbler valve closed
5/4/2011	11:23:42 AM	Main Vac valve opened
5/4/2011	11:23:42 AM	Bypass valve opened
5/4/2011	11:23:42 AM	Helium MFC set to  0.000000
5/4/2011	11:23:42 AM	H2 MFC set to  0.000000
5/4/2011	11:23:42 AM	BCl3 MFC set to  0.000000
5/4/2011	11:23:42 AM	PHl3 MFC set to  0.000000
5/4/2011	11:23:42 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:23:42 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:23:42 AM	Tube furnace set to 0
5/4/2011	11:24:42 AM	H2 valve closed
5/4/2011	11:24:42 AM	BCl3 valve closed
5/4/2011	11:24:42 AM	PH3 valve closed
5/4/2011	11:24:42 AM	SiCl4 pre valve closed
5/4/2011	11:24:42 AM	SiCl4 post valve closed
5/4/2011	11:24:42 AM	Bubbler valve closed
5/4/2011	11:24:42 AM	Helium valve opened
5/4/2011	11:24:42 AM	Main Vac valve opened
5/4/2011	11:24:42 AM	Bypass valve opened
5/4/2011	11:24:42 AM	Helium MFC set to  100.000000
5/4/2011	11:24:42 AM	H2 MFC set to  0.000000
5/4/2011	11:24:42 AM	BCl3 MFC set to  0.000000
5/4/2011	11:24:42 AM	PHl3 MFC set to  0.000000
5/4/2011	11:24:42 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:24:42 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:24:42 AM	Tube furnace set to 0
5/4/2011	11:25:42 AM	Helium valve closed
5/4/2011	11:25:42 AM	H2 valve closed
5/4/2011	11:25:42 AM	BCl3 valve closed
5/4/2011	11:25:42 AM	PH3 valve closed
5/4/2011	11:25:42 AM	SiCl4 pre valve closed
5/4/2011	11:25:42 AM	SiCl4 post valve closed
5/4/2011	11:25:42 AM	Bubbler valve closed
5/4/2011	11:25:42 AM	Main Vac valve opened
5/4/2011	11:25:42 AM	Bypass valve opened
5/4/2011	11:25:42 AM	Helium MFC set to  0.000000
5/4/2011	11:25:42 AM	H2 MFC set to  0.000000
5/4/2011	11:25:42 AM	BCl3 MFC set to  0.000000
5/4/2011	11:25:42 AM	PHl3 MFC set to  0.000000
5/4/2011	11:25:42 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:25:42 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:25:42 AM	Tube furnace set to 0
5/4/2011	11:26:42 AM	H2 valve closed
5/4/2011	11:26:42 AM	BCl3 valve closed
5/4/2011	11:26:42 AM	PH3 valve closed
5/4/2011	11:26:42 AM	SiCl4 pre valve closed
5/4/2011	11:26:42 AM	SiCl4 post valve closed
5/4/2011	11:26:42 AM	Bubbler valve closed
5/4/2011	11:26:42 AM	Helium valve opened
5/4/2011	11:26:42 AM	Main Vac valve opened
5/4/2011	11:26:42 AM	Bypass valve opened
5/4/2011	11:26:42 AM	Helium MFC set to  100.000000
5/4/2011	11:26:42 AM	H2 MFC set to  0.000000
5/4/2011	11:26:42 AM	BCl3 MFC set to  0.000000
5/4/2011	11:26:42 AM	PHl3 MFC set to  0.000000
5/4/2011	11:26:42 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:26:42 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:26:42 AM	Tube furnace set to 0
5/4/2011	11:27:42 AM	Helium valve closed
5/4/2011	11:27:42 AM	H2 valve closed
5/4/2011	11:27:42 AM	BCl3 valve closed
5/4/2011	11:27:42 AM	PH3 valve closed
5/4/2011	11:27:42 AM	SiCl4 pre valve closed
5/4/2011	11:27:42 AM	SiCl4 post valve closed
5/4/2011	11:27:42 AM	Bubbler valve closed
5/4/2011	11:27:42 AM	Main Vac valve opened
5/4/2011	11:27:42 AM	Bypass valve opened
5/4/2011	11:27:42 AM	Helium MFC set to  0.000000
5/4/2011	11:27:42 AM	H2 MFC set to  0.000000
5/4/2011	11:27:42 AM	BCl3 MFC set to  0.000000
5/4/2011	11:27:42 AM	PHl3 MFC set to  0.000000
5/4/2011	11:27:42 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:27:42 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:27:43 AM	Tube furnace set to 0
5/4/2011	11:28:43 AM	H2 valve closed
5/4/2011	11:28:43 AM	BCl3 valve closed
5/4/2011	11:28:43 AM	PH3 valve closed
5/4/2011	11:28:43 AM	SiCl4 pre valve closed
5/4/2011	11:28:43 AM	SiCl4 post valve closed
5/4/2011	11:28:43 AM	Bubbler valve closed
5/4/2011	11:28:43 AM	Helium valve opened
5/4/2011	11:28:43 AM	Main Vac valve opened
5/4/2011	11:28:43 AM	Bypass valve opened
5/4/2011	11:28:43 AM	Helium MFC set to  100.000000
5/4/2011	11:28:43 AM	H2 MFC set to  0.000000
5/4/2011	11:28:43 AM	BCl3 MFC set to  0.000000
5/4/2011	11:28:43 AM	PHl3 MFC set to  0.000000
5/4/2011	11:28:43 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:28:43 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:28:43 AM	Tube furnace set to 0
5/4/2011	11:29:43 AM	Helium valve closed
5/4/2011	11:29:43 AM	H2 valve closed
5/4/2011	11:29:43 AM	BCl3 valve closed
5/4/2011	11:29:43 AM	PH3 valve closed
5/4/2011	11:29:43 AM	SiCl4 pre valve closed
5/4/2011	11:29:43 AM	SiCl4 post valve closed
5/4/2011	11:29:43 AM	Bubbler valve closed
5/4/2011	11:29:43 AM	Main Vac valve opened
5/4/2011	11:29:43 AM	Bypass valve opened
5/4/2011	11:29:43 AM	Helium MFC set to  0.000000
5/4/2011	11:29:43 AM	H2 MFC set to  0.000000
5/4/2011	11:29:43 AM	BCl3 MFC set to  0.000000
5/4/2011	11:29:43 AM	PHl3 MFC set to  0.000000
5/4/2011	11:29:43 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:29:43 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:29:43 AM	Tube furnace set to 0
5/4/2011	11:30:43 AM	H2 valve closed
5/4/2011	11:30:43 AM	BCl3 valve closed
5/4/2011	11:30:43 AM	PH3 valve closed
5/4/2011	11:30:43 AM	SiCl4 pre valve closed
5/4/2011	11:30:43 AM	SiCl4 post valve closed
5/4/2011	11:30:43 AM	Bubbler valve closed
5/4/2011	11:30:43 AM	Helium valve opened
5/4/2011	11:30:43 AM	Main Vac valve opened
5/4/2011	11:30:43 AM	Bypass valve opened
5/4/2011	11:30:43 AM	Helium MFC set to  100.000000
5/4/2011	11:30:43 AM	H2 MFC set to  0.000000
5/4/2011	11:30:43 AM	BCl3 MFC set to  0.000000
5/4/2011	11:30:43 AM	PHl3 MFC set to  0.000000
5/4/2011	11:30:43 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:30:43 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:30:43 AM	Tube furnace set to 0
5/4/2011	11:31:43 AM	Helium valve closed
5/4/2011	11:31:43 AM	H2 valve closed
5/4/2011	11:31:43 AM	BCl3 valve closed
5/4/2011	11:31:43 AM	PH3 valve closed
5/4/2011	11:31:43 AM	SiCl4 pre valve closed
5/4/2011	11:31:43 AM	SiCl4 post valve closed
5/4/2011	11:31:43 AM	Bubbler valve closed
5/4/2011	11:31:43 AM	Main Vac valve opened
5/4/2011	11:31:43 AM	Bypass valve opened
5/4/2011	11:31:43 AM	Helium MFC set to  0.000000
5/4/2011	11:31:43 AM	H2 MFC set to  0.000000
5/4/2011	11:31:43 AM	BCl3 MFC set to  0.000000
5/4/2011	11:31:43 AM	PHl3 MFC set to  0.000000
5/4/2011	11:31:43 AM	SiCl4 MFC set to  0.000000
5/4/2011	11:31:43 AM	Bypass solenoid MFC set to  0.000000
5/4/2011	11:31:43 AM	Tube furnace set to 0
5/4/2011	11:31:44 AM	Run finished at 11:31 AM
5/4/2011	11:31:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/4/2011	11:39:53 AM	Helium MFC set to  10.000000
5/4/2011	11:39:54 AM	Helium valve opened
5/4/2011	12:41:23 PM	Helium valve closed
5/4/2011	12:41:59 PM	Recipe started at 12:41 PM
5/4/2011	12:41:59 PM	Helium valve closed
5/4/2011	12:41:59 PM	BCl3 valve closed
5/4/2011	12:41:59 PM	PH3 valve closed
5/4/2011	12:41:59 PM	SiCl4 pre valve closed
5/4/2011	12:41:59 PM	SiCl4 post valve closed
5/4/2011	12:41:59 PM	Main Vac valve closed
5/4/2011	12:41:59 PM	Bypass valve closed
5/4/2011	12:41:59 PM	Bubbler valve closed
5/4/2011	12:41:59 PM	H2 valve opened
5/4/2011	12:41:59 PM	Helium MFC set to  0.000000
5/4/2011	12:41:59 PM	H2 MFC set to  500.000000
5/4/2011	12:41:59 PM	BCl3 MFC set to  0.000000
5/4/2011	12:41:59 PM	PHl3 MFC set to  0.000000
5/4/2011	12:41:59 PM	SiCl4 MFC set to  0.000000
5/4/2011	12:41:59 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	12:41:59 PM	Tube furnace set to 0
5/4/2011	12:43:22 PM	Helium valve closed
5/4/2011	12:43:22 PM	BCl3 valve closed
5/4/2011	12:43:22 PM	PH3 valve closed
5/4/2011	12:43:22 PM	SiCl4 pre valve closed
5/4/2011	12:43:22 PM	SiCl4 post valve closed
5/4/2011	12:43:22 PM	Main Vac valve closed
5/4/2011	12:43:22 PM	Bypass valve closed
5/4/2011	12:43:22 PM	H2 valve opened
5/4/2011	12:43:22 PM	Bubbler valve opened
5/4/2011	12:43:22 PM	Helium MFC set to  0.000000
5/4/2011	12:43:22 PM	H2 MFC set to  500.000000
5/4/2011	12:43:22 PM	BCl3 MFC set to  0.000000
5/4/2011	12:43:22 PM	PHl3 MFC set to  0.000000
5/4/2011	12:43:22 PM	SiCl4 MFC set to  0.000000
5/4/2011	12:43:22 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	12:43:22 PM	Tube furnace set to 1000
5/4/2011	1:03:22 PM	Helium valve closed
5/4/2011	1:03:22 PM	BCl3 valve closed
5/4/2011	1:03:22 PM	PH3 valve closed
5/4/2011	1:03:22 PM	Main Vac valve closed
5/4/2011	1:03:22 PM	Bypass valve closed
5/4/2011	1:03:22 PM	H2 valve opened
5/4/2011	1:03:22 PM	SiCl4 pre valve opened
5/4/2011	1:03:22 PM	SiCl4 post valve opened
5/4/2011	1:03:22 PM	Bubbler valve opened
5/4/2011	1:03:22 PM	Helium MFC set to  0.000000
5/4/2011	1:03:22 PM	H2 MFC set to  500.000000
5/4/2011	1:03:22 PM	BCl3 MFC set to  0.000000
5/4/2011	1:03:22 PM	PHl3 MFC set to  0.000000
5/4/2011	1:03:22 PM	SiCl4 MFC set to  75.000000
5/4/2011	1:03:22 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	1:03:22 PM	Tube furnace set to 1000
5/4/2011	1:23:22 PM	Helium valve closed
5/4/2011	1:23:22 PM	BCl3 valve closed
5/4/2011	1:23:22 PM	PH3 valve closed
5/4/2011	1:23:22 PM	SiCl4 pre valve closed
5/4/2011	1:23:22 PM	SiCl4 post valve closed
5/4/2011	1:23:22 PM	Main Vac valve closed
5/4/2011	1:23:22 PM	Bypass valve closed
5/4/2011	1:23:22 PM	H2 valve opened
5/4/2011	1:23:22 PM	Bubbler valve opened
5/4/2011	1:23:22 PM	Helium MFC set to  0.000000
5/4/2011	1:23:22 PM	H2 MFC set to  500.000000
5/4/2011	1:23:22 PM	BCl3 MFC set to  0.000000
5/4/2011	1:23:22 PM	PHl3 MFC set to  0.000000
5/4/2011	1:23:22 PM	SiCl4 MFC set to  0.000000
5/4/2011	1:23:22 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	1:23:22 PM	Tube furnace set to 0
5/4/2011	1:56:48 PM	H2 valve closed
5/4/2011	1:56:48 PM	BCl3 valve closed
5/4/2011	1:56:48 PM	PH3 valve closed
5/4/2011	1:56:48 PM	SiCl4 pre valve closed
5/4/2011	1:56:48 PM	SiCl4 post valve closed
5/4/2011	1:56:48 PM	Main Vac valve closed
5/4/2011	1:56:48 PM	Bypass valve closed
5/4/2011	1:56:48 PM	Helium valve opened
5/4/2011	1:56:48 PM	Bubbler valve opened
5/4/2011	1:56:48 PM	Helium MFC set to  500.000000
5/4/2011	1:56:48 PM	H2 MFC set to  0.000000
5/4/2011	1:56:48 PM	BCl3 MFC set to  0.000000
5/4/2011	1:56:48 PM	PHl3 MFC set to  0.000000
5/4/2011	1:56:48 PM	SiCl4 MFC set to  0.000000
5/4/2011	1:56:48 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	1:56:48 PM	Tube furnace set to 0
5/4/2011	1:57:05 PM	Helium valve closed
5/4/2011	1:57:05 PM	H2 valve closed
5/4/2011	1:57:05 PM	BCl3 valve closed
5/4/2011	1:57:05 PM	PH3 valve closed
5/4/2011	1:57:05 PM	SiCl4 pre valve closed
5/4/2011	1:57:05 PM	SiCl4 post valve closed
5/4/2011	1:57:05 PM	Main Vac valve closed
5/4/2011	1:57:05 PM	Bypass valve closed
5/4/2011	1:57:05 PM	Bubbler valve closed
5/4/2011	1:57:05 PM	Helium MFC set to  0.000000
5/4/2011	1:57:05 PM	H2 MFC set to  0.000000
5/4/2011	1:57:05 PM	BCl3 MFC set to  0.000000
5/4/2011	1:57:05 PM	PHl3 MFC set to  0.000000
5/4/2011	1:57:05 PM	SiCl4 MFC set to  0.000000
5/4/2011	1:57:05 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	1:57:05 PM	Tube furnace set to 0
5/4/2011	1:57:05 PM	Run finished at 1:57 PM
5/4/2011	2:02:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/4/2011	2:02:55 PM	Recipe started at 2:02 PM
5/4/2011	2:02:55 PM	Helium valve closed
5/4/2011	2:02:55 PM	H2 valve closed
5/4/2011	2:02:55 PM	BCl3 valve closed
5/4/2011	2:02:55 PM	PH3 valve closed
5/4/2011	2:02:55 PM	SiCl4 pre valve closed
5/4/2011	2:02:55 PM	SiCl4 post valve closed
5/4/2011	2:02:55 PM	Main Vac valve closed
5/4/2011	2:02:55 PM	Bubbler valve closed
5/4/2011	2:02:55 PM	Bypass valve opened
5/4/2011	2:02:55 PM	Helium MFC set to  0.000000
5/4/2011	2:02:55 PM	H2 MFC set to  0.000000
5/4/2011	2:02:55 PM	BCl3 MFC set to  0.000000
5/4/2011	2:02:55 PM	PHl3 MFC set to  0.000000
5/4/2011	2:02:55 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:02:55 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:02:55 PM	Tube furnace set to 0
5/4/2011	2:03:27 PM	Helium valve closed
5/4/2011	2:03:27 PM	H2 valve closed
5/4/2011	2:03:27 PM	BCl3 valve closed
5/4/2011	2:03:27 PM	PH3 valve closed
5/4/2011	2:03:27 PM	SiCl4 pre valve closed
5/4/2011	2:03:27 PM	SiCl4 post valve closed
5/4/2011	2:03:27 PM	Bubbler valve closed
5/4/2011	2:03:27 PM	Main Vac valve opened
5/4/2011	2:03:27 PM	Bypass valve opened
5/4/2011	2:03:27 PM	Helium MFC set to  0.000000
5/4/2011	2:03:27 PM	H2 MFC set to  0.000000
5/4/2011	2:03:27 PM	BCl3 MFC set to  0.000000
5/4/2011	2:03:27 PM	PHl3 MFC set to  0.000000
5/4/2011	2:03:27 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:03:27 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:03:27 PM	Tube furnace set to 0
5/4/2011	2:03:27 PM	Run finished at 2:03 PM
5/4/2011	2:03:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/4/2011	2:03:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/4/2011	2:03:58 PM	Recipe started at 2:03 PM
5/4/2011	2:03:58 PM	Helium valve closed
5/4/2011	2:03:58 PM	H2 valve closed
5/4/2011	2:03:58 PM	BCl3 valve closed
5/4/2011	2:03:58 PM	PH3 valve closed
5/4/2011	2:03:58 PM	SiCl4 pre valve closed
5/4/2011	2:03:58 PM	SiCl4 post valve closed
5/4/2011	2:03:58 PM	Main Vac valve closed
5/4/2011	2:03:58 PM	Bubbler valve closed
5/4/2011	2:03:58 PM	Bypass valve opened
5/4/2011	2:03:58 PM	Helium MFC set to  0.000000
5/4/2011	2:03:58 PM	H2 MFC set to  0.000000
5/4/2011	2:03:58 PM	BCl3 MFC set to  0.000000
5/4/2011	2:03:58 PM	PHl3 MFC set to  0.000000
5/4/2011	2:03:58 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:03:58 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:03:58 PM	Tube furnace set to 0
5/4/2011	2:03:59 PM	Helium valve closed
5/4/2011	2:03:59 PM	H2 valve closed
5/4/2011	2:03:59 PM	BCl3 valve closed
5/4/2011	2:03:59 PM	PH3 valve closed
5/4/2011	2:03:59 PM	SiCl4 pre valve closed
5/4/2011	2:03:59 PM	SiCl4 post valve closed
5/4/2011	2:03:59 PM	Bubbler valve closed
5/4/2011	2:03:59 PM	Main Vac valve opened
5/4/2011	2:03:59 PM	Bypass valve opened
5/4/2011	2:03:59 PM	Helium MFC set to  0.000000
5/4/2011	2:03:59 PM	H2 MFC set to  0.000000
5/4/2011	2:03:59 PM	BCl3 MFC set to  0.000000
5/4/2011	2:03:59 PM	PHl3 MFC set to  0.000000
5/4/2011	2:03:59 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:03:59 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:03:59 PM	Tube furnace set to 0
5/4/2011	2:04:59 PM	H2 valve closed
5/4/2011	2:04:59 PM	BCl3 valve closed
5/4/2011	2:04:59 PM	PH3 valve closed
5/4/2011	2:04:59 PM	SiCl4 pre valve closed
5/4/2011	2:04:59 PM	SiCl4 post valve closed
5/4/2011	2:04:59 PM	Bubbler valve closed
5/4/2011	2:04:59 PM	Helium valve opened
5/4/2011	2:04:59 PM	Main Vac valve opened
5/4/2011	2:04:59 PM	Bypass valve opened
5/4/2011	2:04:59 PM	Helium MFC set to  100.000000
5/4/2011	2:04:59 PM	H2 MFC set to  0.000000
5/4/2011	2:04:59 PM	BCl3 MFC set to  0.000000
5/4/2011	2:04:59 PM	PHl3 MFC set to  0.000000
5/4/2011	2:04:59 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:04:59 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:04:59 PM	Tube furnace set to 0
5/4/2011	2:05:59 PM	Helium valve closed
5/4/2011	2:05:59 PM	H2 valve closed
5/4/2011	2:05:59 PM	BCl3 valve closed
5/4/2011	2:05:59 PM	PH3 valve closed
5/4/2011	2:05:59 PM	SiCl4 pre valve closed
5/4/2011	2:05:59 PM	SiCl4 post valve closed
5/4/2011	2:05:59 PM	Bubbler valve closed
5/4/2011	2:05:59 PM	Main Vac valve opened
5/4/2011	2:05:59 PM	Bypass valve opened
5/4/2011	2:05:59 PM	Helium MFC set to  0.000000
5/4/2011	2:05:59 PM	H2 MFC set to  0.000000
5/4/2011	2:05:59 PM	BCl3 MFC set to  0.000000
5/4/2011	2:05:59 PM	PHl3 MFC set to  0.000000
5/4/2011	2:05:59 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:05:59 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:05:59 PM	Tube furnace set to 0
5/4/2011	2:06:59 PM	H2 valve closed
5/4/2011	2:06:59 PM	BCl3 valve closed
5/4/2011	2:06:59 PM	PH3 valve closed
5/4/2011	2:06:59 PM	SiCl4 pre valve closed
5/4/2011	2:06:59 PM	SiCl4 post valve closed
5/4/2011	2:06:59 PM	Bubbler valve closed
5/4/2011	2:06:59 PM	Helium valve opened
5/4/2011	2:06:59 PM	Main Vac valve opened
5/4/2011	2:06:59 PM	Bypass valve opened
5/4/2011	2:06:59 PM	Helium MFC set to  100.000000
5/4/2011	2:06:59 PM	H2 MFC set to  0.000000
5/4/2011	2:06:59 PM	BCl3 MFC set to  0.000000
5/4/2011	2:06:59 PM	PHl3 MFC set to  0.000000
5/4/2011	2:06:59 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:06:59 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:06:59 PM	Tube furnace set to 0
5/4/2011	2:08:00 PM	Helium valve closed
5/4/2011	2:08:00 PM	H2 valve closed
5/4/2011	2:08:00 PM	BCl3 valve closed
5/4/2011	2:08:00 PM	PH3 valve closed
5/4/2011	2:08:00 PM	SiCl4 pre valve closed
5/4/2011	2:08:00 PM	SiCl4 post valve closed
5/4/2011	2:08:00 PM	Bubbler valve closed
5/4/2011	2:08:00 PM	Main Vac valve opened
5/4/2011	2:08:00 PM	Bypass valve opened
5/4/2011	2:08:00 PM	Helium MFC set to  0.000000
5/4/2011	2:08:00 PM	H2 MFC set to  0.000000
5/4/2011	2:08:00 PM	BCl3 MFC set to  0.000000
5/4/2011	2:08:00 PM	PHl3 MFC set to  0.000000
5/4/2011	2:08:00 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:08:00 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:08:00 PM	Tube furnace set to 0
5/4/2011	2:09:00 PM	H2 valve closed
5/4/2011	2:09:00 PM	BCl3 valve closed
5/4/2011	2:09:00 PM	PH3 valve closed
5/4/2011	2:09:00 PM	SiCl4 pre valve closed
5/4/2011	2:09:00 PM	SiCl4 post valve closed
5/4/2011	2:09:00 PM	Bubbler valve closed
5/4/2011	2:09:00 PM	Helium valve opened
5/4/2011	2:09:00 PM	Main Vac valve opened
5/4/2011	2:09:00 PM	Bypass valve opened
5/4/2011	2:09:00 PM	Helium MFC set to  100.000000
5/4/2011	2:09:00 PM	H2 MFC set to  0.000000
5/4/2011	2:09:00 PM	BCl3 MFC set to  0.000000
5/4/2011	2:09:00 PM	PHl3 MFC set to  0.000000
5/4/2011	2:09:00 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:09:00 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:09:00 PM	Tube furnace set to 0
5/4/2011	2:10:00 PM	Helium valve closed
5/4/2011	2:10:00 PM	H2 valve closed
5/4/2011	2:10:00 PM	BCl3 valve closed
5/4/2011	2:10:00 PM	PH3 valve closed
5/4/2011	2:10:00 PM	SiCl4 pre valve closed
5/4/2011	2:10:00 PM	SiCl4 post valve closed
5/4/2011	2:10:00 PM	Bubbler valve closed
5/4/2011	2:10:00 PM	Main Vac valve opened
5/4/2011	2:10:00 PM	Bypass valve opened
5/4/2011	2:10:00 PM	Helium MFC set to  0.000000
5/4/2011	2:10:00 PM	H2 MFC set to  0.000000
5/4/2011	2:10:00 PM	BCl3 MFC set to  0.000000
5/4/2011	2:10:00 PM	PHl3 MFC set to  0.000000
5/4/2011	2:10:00 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:10:00 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:10:00 PM	Tube furnace set to 0
5/4/2011	2:11:00 PM	H2 valve closed
5/4/2011	2:11:00 PM	BCl3 valve closed
5/4/2011	2:11:00 PM	PH3 valve closed
5/4/2011	2:11:00 PM	SiCl4 pre valve closed
5/4/2011	2:11:00 PM	SiCl4 post valve closed
5/4/2011	2:11:00 PM	Bubbler valve closed
5/4/2011	2:11:00 PM	Helium valve opened
5/4/2011	2:11:00 PM	Main Vac valve opened
5/4/2011	2:11:00 PM	Bypass valve opened
5/4/2011	2:11:00 PM	Helium MFC set to  100.000000
5/4/2011	2:11:00 PM	H2 MFC set to  0.000000
5/4/2011	2:11:00 PM	BCl3 MFC set to  0.000000
5/4/2011	2:11:00 PM	PHl3 MFC set to  0.000000
5/4/2011	2:11:00 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:11:00 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:11:00 PM	Tube furnace set to 0
5/4/2011	2:12:00 PM	Helium valve closed
5/4/2011	2:12:00 PM	H2 valve closed
5/4/2011	2:12:00 PM	BCl3 valve closed
5/4/2011	2:12:00 PM	PH3 valve closed
5/4/2011	2:12:00 PM	SiCl4 pre valve closed
5/4/2011	2:12:00 PM	SiCl4 post valve closed
5/4/2011	2:12:00 PM	Bubbler valve closed
5/4/2011	2:12:00 PM	Main Vac valve opened
5/4/2011	2:12:00 PM	Bypass valve opened
5/4/2011	2:12:00 PM	Helium MFC set to  0.000000
5/4/2011	2:12:00 PM	H2 MFC set to  0.000000
5/4/2011	2:12:00 PM	BCl3 MFC set to  0.000000
5/4/2011	2:12:00 PM	PHl3 MFC set to  0.000000
5/4/2011	2:12:00 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:12:00 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:12:00 PM	Tube furnace set to 0
5/4/2011	2:13:01 PM	H2 valve closed
5/4/2011	2:13:01 PM	BCl3 valve closed
5/4/2011	2:13:01 PM	PH3 valve closed
5/4/2011	2:13:01 PM	SiCl4 pre valve closed
5/4/2011	2:13:01 PM	SiCl4 post valve closed
5/4/2011	2:13:01 PM	Bubbler valve closed
5/4/2011	2:13:01 PM	Helium valve opened
5/4/2011	2:13:01 PM	Main Vac valve opened
5/4/2011	2:13:01 PM	Bypass valve opened
5/4/2011	2:13:01 PM	Helium MFC set to  100.000000
5/4/2011	2:13:01 PM	H2 MFC set to  0.000000
5/4/2011	2:13:01 PM	BCl3 MFC set to  0.000000
5/4/2011	2:13:01 PM	PHl3 MFC set to  0.000000
5/4/2011	2:13:01 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:13:01 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:13:01 PM	Tube furnace set to 0
5/4/2011	2:14:01 PM	Helium valve closed
5/4/2011	2:14:01 PM	H2 valve closed
5/4/2011	2:14:01 PM	BCl3 valve closed
5/4/2011	2:14:01 PM	PH3 valve closed
5/4/2011	2:14:01 PM	SiCl4 pre valve closed
5/4/2011	2:14:01 PM	SiCl4 post valve closed
5/4/2011	2:14:01 PM	Bubbler valve closed
5/4/2011	2:14:01 PM	Main Vac valve opened
5/4/2011	2:14:01 PM	Bypass valve opened
5/4/2011	2:14:01 PM	Helium MFC set to  0.000000
5/4/2011	2:14:01 PM	H2 MFC set to  0.000000
5/4/2011	2:14:01 PM	BCl3 MFC set to  0.000000
5/4/2011	2:14:01 PM	PHl3 MFC set to  0.000000
5/4/2011	2:14:01 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:14:01 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:14:01 PM	Tube furnace set to 0
5/4/2011	2:15:01 PM	H2 valve closed
5/4/2011	2:15:01 PM	BCl3 valve closed
5/4/2011	2:15:01 PM	PH3 valve closed
5/4/2011	2:15:01 PM	SiCl4 pre valve closed
5/4/2011	2:15:01 PM	SiCl4 post valve closed
5/4/2011	2:15:01 PM	Bubbler valve closed
5/4/2011	2:15:01 PM	Helium valve opened
5/4/2011	2:15:01 PM	Main Vac valve opened
5/4/2011	2:15:01 PM	Bypass valve opened
5/4/2011	2:15:01 PM	Helium MFC set to  100.000000
5/4/2011	2:15:01 PM	H2 MFC set to  0.000000
5/4/2011	2:15:01 PM	BCl3 MFC set to  0.000000
5/4/2011	2:15:01 PM	PHl3 MFC set to  0.000000
5/4/2011	2:15:01 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:15:01 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:15:01 PM	Tube furnace set to 0
5/4/2011	2:16:01 PM	Helium valve closed
5/4/2011	2:16:01 PM	H2 valve closed
5/4/2011	2:16:01 PM	BCl3 valve closed
5/4/2011	2:16:01 PM	PH3 valve closed
5/4/2011	2:16:01 PM	SiCl4 pre valve closed
5/4/2011	2:16:01 PM	SiCl4 post valve closed
5/4/2011	2:16:01 PM	Bubbler valve closed
5/4/2011	2:16:01 PM	Main Vac valve opened
5/4/2011	2:16:01 PM	Bypass valve opened
5/4/2011	2:16:01 PM	Helium MFC set to  0.000000
5/4/2011	2:16:01 PM	H2 MFC set to  0.000000
5/4/2011	2:16:01 PM	BCl3 MFC set to  0.000000
5/4/2011	2:16:01 PM	PHl3 MFC set to  0.000000
5/4/2011	2:16:01 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:16:01 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:16:01 PM	Tube furnace set to 0
5/4/2011	2:17:01 PM	H2 valve closed
5/4/2011	2:17:01 PM	BCl3 valve closed
5/4/2011	2:17:01 PM	PH3 valve closed
5/4/2011	2:17:01 PM	SiCl4 pre valve closed
5/4/2011	2:17:01 PM	SiCl4 post valve closed
5/4/2011	2:17:01 PM	Bubbler valve closed
5/4/2011	2:17:01 PM	Helium valve opened
5/4/2011	2:17:01 PM	Main Vac valve opened
5/4/2011	2:17:01 PM	Bypass valve opened
5/4/2011	2:17:01 PM	Helium MFC set to  100.000000
5/4/2011	2:17:01 PM	H2 MFC set to  0.000000
5/4/2011	2:17:01 PM	BCl3 MFC set to  0.000000
5/4/2011	2:17:01 PM	PHl3 MFC set to  0.000000
5/4/2011	2:17:01 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:17:01 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:17:02 PM	Tube furnace set to 0
5/4/2011	2:18:02 PM	Helium valve closed
5/4/2011	2:18:02 PM	H2 valve closed
5/4/2011	2:18:02 PM	BCl3 valve closed
5/4/2011	2:18:02 PM	PH3 valve closed
5/4/2011	2:18:02 PM	SiCl4 pre valve closed
5/4/2011	2:18:02 PM	SiCl4 post valve closed
5/4/2011	2:18:02 PM	Bubbler valve closed
5/4/2011	2:18:02 PM	Main Vac valve opened
5/4/2011	2:18:02 PM	Bypass valve opened
5/4/2011	2:18:02 PM	Helium MFC set to  0.000000
5/4/2011	2:18:02 PM	H2 MFC set to  0.000000
5/4/2011	2:18:02 PM	BCl3 MFC set to  0.000000
5/4/2011	2:18:02 PM	PHl3 MFC set to  0.000000
5/4/2011	2:18:02 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:18:02 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:18:02 PM	Tube furnace set to 0
5/4/2011	2:19:02 PM	H2 valve closed
5/4/2011	2:19:02 PM	BCl3 valve closed
5/4/2011	2:19:02 PM	PH3 valve closed
5/4/2011	2:19:02 PM	SiCl4 pre valve closed
5/4/2011	2:19:02 PM	SiCl4 post valve closed
5/4/2011	2:19:02 PM	Bubbler valve closed
5/4/2011	2:19:02 PM	Helium valve opened
5/4/2011	2:19:02 PM	Main Vac valve opened
5/4/2011	2:19:02 PM	Bypass valve opened
5/4/2011	2:19:02 PM	Helium MFC set to  100.000000
5/4/2011	2:19:02 PM	H2 MFC set to  0.000000
5/4/2011	2:19:02 PM	BCl3 MFC set to  0.000000
5/4/2011	2:19:02 PM	PHl3 MFC set to  0.000000
5/4/2011	2:19:02 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:19:02 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:19:02 PM	Tube furnace set to 0
5/4/2011	2:20:02 PM	Helium valve closed
5/4/2011	2:20:02 PM	H2 valve closed
5/4/2011	2:20:02 PM	BCl3 valve closed
5/4/2011	2:20:02 PM	PH3 valve closed
5/4/2011	2:20:02 PM	SiCl4 pre valve closed
5/4/2011	2:20:02 PM	SiCl4 post valve closed
5/4/2011	2:20:02 PM	Bubbler valve closed
5/4/2011	2:20:02 PM	Main Vac valve opened
5/4/2011	2:20:02 PM	Bypass valve opened
5/4/2011	2:20:02 PM	Helium MFC set to  0.000000
5/4/2011	2:20:02 PM	H2 MFC set to  0.000000
5/4/2011	2:20:02 PM	BCl3 MFC set to  0.000000
5/4/2011	2:20:02 PM	PHl3 MFC set to  0.000000
5/4/2011	2:20:02 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:20:02 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:20:02 PM	Tube furnace set to 0
5/4/2011	2:21:02 PM	H2 valve closed
5/4/2011	2:21:02 PM	BCl3 valve closed
5/4/2011	2:21:02 PM	PH3 valve closed
5/4/2011	2:21:02 PM	SiCl4 pre valve closed
5/4/2011	2:21:02 PM	SiCl4 post valve closed
5/4/2011	2:21:02 PM	Bubbler valve closed
5/4/2011	2:21:02 PM	Helium valve opened
5/4/2011	2:21:02 PM	Main Vac valve opened
5/4/2011	2:21:02 PM	Bypass valve opened
5/4/2011	2:21:02 PM	Helium MFC set to  100.000000
5/4/2011	2:21:02 PM	H2 MFC set to  0.000000
5/4/2011	2:21:02 PM	BCl3 MFC set to  0.000000
5/4/2011	2:21:02 PM	PHl3 MFC set to  0.000000
5/4/2011	2:21:02 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:21:02 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:21:02 PM	Tube furnace set to 0
5/4/2011	2:22:02 PM	Helium valve closed
5/4/2011	2:22:02 PM	H2 valve closed
5/4/2011	2:22:02 PM	BCl3 valve closed
5/4/2011	2:22:02 PM	PH3 valve closed
5/4/2011	2:22:02 PM	SiCl4 pre valve closed
5/4/2011	2:22:02 PM	SiCl4 post valve closed
5/4/2011	2:22:02 PM	Bubbler valve closed
5/4/2011	2:22:02 PM	Main Vac valve opened
5/4/2011	2:22:02 PM	Bypass valve opened
5/4/2011	2:22:02 PM	Helium MFC set to  0.000000
5/4/2011	2:22:02 PM	H2 MFC set to  0.000000
5/4/2011	2:22:02 PM	BCl3 MFC set to  0.000000
5/4/2011	2:22:02 PM	PHl3 MFC set to  0.000000
5/4/2011	2:22:02 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:22:02 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:22:03 PM	Tube furnace set to 0
5/4/2011	2:23:03 PM	H2 valve closed
5/4/2011	2:23:03 PM	BCl3 valve closed
5/4/2011	2:23:03 PM	PH3 valve closed
5/4/2011	2:23:03 PM	SiCl4 pre valve closed
5/4/2011	2:23:03 PM	SiCl4 post valve closed
5/4/2011	2:23:03 PM	Bubbler valve closed
5/4/2011	2:23:03 PM	Helium valve opened
5/4/2011	2:23:03 PM	Main Vac valve opened
5/4/2011	2:23:03 PM	Bypass valve opened
5/4/2011	2:23:03 PM	Helium MFC set to  100.000000
5/4/2011	2:23:03 PM	H2 MFC set to  0.000000
5/4/2011	2:23:03 PM	BCl3 MFC set to  0.000000
5/4/2011	2:23:03 PM	PHl3 MFC set to  0.000000
5/4/2011	2:23:03 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:23:03 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:23:03 PM	Tube furnace set to 0
5/4/2011	2:24:03 PM	Helium valve closed
5/4/2011	2:24:03 PM	H2 valve closed
5/4/2011	2:24:03 PM	BCl3 valve closed
5/4/2011	2:24:03 PM	PH3 valve closed
5/4/2011	2:24:03 PM	SiCl4 pre valve closed
5/4/2011	2:24:03 PM	SiCl4 post valve closed
5/4/2011	2:24:03 PM	Bubbler valve closed
5/4/2011	2:24:03 PM	Main Vac valve opened
5/4/2011	2:24:03 PM	Bypass valve opened
5/4/2011	2:24:03 PM	Helium MFC set to  0.000000
5/4/2011	2:24:03 PM	H2 MFC set to  0.000000
5/4/2011	2:24:03 PM	BCl3 MFC set to  0.000000
5/4/2011	2:24:03 PM	PHl3 MFC set to  0.000000
5/4/2011	2:24:03 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:24:03 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:24:03 PM	Tube furnace set to 0
5/4/2011	2:24:04 PM	Run finished at 2:24 PM
5/4/2011	2:24:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/4/2011	2:33:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/4/2011	2:33:38 PM	Recipe started at 2:33 PM
5/4/2011	2:33:38 PM	Helium valve closed
5/4/2011	2:33:38 PM	H2 valve closed
5/4/2011	2:33:38 PM	BCl3 valve closed
5/4/2011	2:33:38 PM	PH3 valve closed
5/4/2011	2:33:38 PM	SiCl4 pre valve closed
5/4/2011	2:33:38 PM	SiCl4 post valve closed
5/4/2011	2:33:38 PM	Main Vac valve closed
5/4/2011	2:33:38 PM	Bubbler valve closed
5/4/2011	2:33:38 PM	Bypass valve opened
5/4/2011	2:33:38 PM	Helium MFC set to  0.000000
5/4/2011	2:33:38 PM	H2 MFC set to  0.000000
5/4/2011	2:33:38 PM	BCl3 MFC set to  0.000000
5/4/2011	2:33:38 PM	PHl3 MFC set to  0.000000
5/4/2011	2:33:38 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:33:38 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:33:38 PM	Tube furnace set to 0
5/4/2011	2:33:38 PM	Helium valve closed
5/4/2011	2:33:38 PM	H2 valve closed
5/4/2011	2:33:38 PM	BCl3 valve closed
5/4/2011	2:33:38 PM	PH3 valve closed
5/4/2011	2:33:38 PM	SiCl4 pre valve closed
5/4/2011	2:33:38 PM	SiCl4 post valve closed
5/4/2011	2:33:38 PM	Bubbler valve closed
5/4/2011	2:33:38 PM	Main Vac valve opened
5/4/2011	2:33:38 PM	Bypass valve opened
5/4/2011	2:33:38 PM	Helium MFC set to  0.000000
5/4/2011	2:33:38 PM	H2 MFC set to  0.000000
5/4/2011	2:33:38 PM	BCl3 MFC set to  0.000000
5/4/2011	2:33:38 PM	PHl3 MFC set to  0.000000
5/4/2011	2:33:38 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:33:38 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:33:39 PM	Tube furnace set to 0
5/4/2011	2:34:39 PM	H2 valve closed
5/4/2011	2:34:39 PM	BCl3 valve closed
5/4/2011	2:34:39 PM	PH3 valve closed
5/4/2011	2:34:39 PM	SiCl4 pre valve closed
5/4/2011	2:34:39 PM	SiCl4 post valve closed
5/4/2011	2:34:39 PM	Bubbler valve closed
5/4/2011	2:34:39 PM	Helium valve opened
5/4/2011	2:34:39 PM	Main Vac valve opened
5/4/2011	2:34:39 PM	Bypass valve opened
5/4/2011	2:34:39 PM	Helium MFC set to  100.000000
5/4/2011	2:34:39 PM	H2 MFC set to  0.000000
5/4/2011	2:34:39 PM	BCl3 MFC set to  0.000000
5/4/2011	2:34:39 PM	PHl3 MFC set to  0.000000
5/4/2011	2:34:39 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:34:39 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:34:39 PM	Tube furnace set to 0
5/4/2011	2:35:39 PM	Helium valve closed
5/4/2011	2:35:39 PM	H2 valve closed
5/4/2011	2:35:39 PM	BCl3 valve closed
5/4/2011	2:35:39 PM	PH3 valve closed
5/4/2011	2:35:39 PM	SiCl4 pre valve closed
5/4/2011	2:35:39 PM	SiCl4 post valve closed
5/4/2011	2:35:39 PM	Bubbler valve closed
5/4/2011	2:35:39 PM	Main Vac valve opened
5/4/2011	2:35:39 PM	Bypass valve opened
5/4/2011	2:35:39 PM	Helium MFC set to  0.000000
5/4/2011	2:35:39 PM	H2 MFC set to  0.000000
5/4/2011	2:35:39 PM	BCl3 MFC set to  0.000000
5/4/2011	2:35:39 PM	PHl3 MFC set to  0.000000
5/4/2011	2:35:39 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:35:39 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:35:39 PM	Tube furnace set to 0
5/4/2011	2:36:39 PM	H2 valve closed
5/4/2011	2:36:39 PM	BCl3 valve closed
5/4/2011	2:36:39 PM	PH3 valve closed
5/4/2011	2:36:39 PM	SiCl4 pre valve closed
5/4/2011	2:36:39 PM	SiCl4 post valve closed
5/4/2011	2:36:39 PM	Bubbler valve closed
5/4/2011	2:36:39 PM	Helium valve opened
5/4/2011	2:36:39 PM	Main Vac valve opened
5/4/2011	2:36:39 PM	Bypass valve opened
5/4/2011	2:36:39 PM	Helium MFC set to  100.000000
5/4/2011	2:36:39 PM	H2 MFC set to  0.000000
5/4/2011	2:36:39 PM	BCl3 MFC set to  0.000000
5/4/2011	2:36:39 PM	PHl3 MFC set to  0.000000
5/4/2011	2:36:39 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:36:39 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:36:39 PM	Tube furnace set to 0
5/4/2011	2:37:39 PM	Helium valve closed
5/4/2011	2:37:39 PM	H2 valve closed
5/4/2011	2:37:39 PM	BCl3 valve closed
5/4/2011	2:37:39 PM	PH3 valve closed
5/4/2011	2:37:39 PM	SiCl4 pre valve closed
5/4/2011	2:37:39 PM	SiCl4 post valve closed
5/4/2011	2:37:39 PM	Bubbler valve closed
5/4/2011	2:37:39 PM	Main Vac valve opened
5/4/2011	2:37:39 PM	Bypass valve opened
5/4/2011	2:37:39 PM	Helium MFC set to  0.000000
5/4/2011	2:37:39 PM	H2 MFC set to  0.000000
5/4/2011	2:37:39 PM	BCl3 MFC set to  0.000000
5/4/2011	2:37:39 PM	PHl3 MFC set to  0.000000
5/4/2011	2:37:39 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:37:39 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:37:39 PM	Tube furnace set to 0
5/4/2011	2:38:39 PM	H2 valve closed
5/4/2011	2:38:39 PM	BCl3 valve closed
5/4/2011	2:38:39 PM	PH3 valve closed
5/4/2011	2:38:39 PM	SiCl4 pre valve closed
5/4/2011	2:38:39 PM	SiCl4 post valve closed
5/4/2011	2:38:39 PM	Bubbler valve closed
5/4/2011	2:38:39 PM	Helium valve opened
5/4/2011	2:38:39 PM	Main Vac valve opened
5/4/2011	2:38:39 PM	Bypass valve opened
5/4/2011	2:38:39 PM	Helium MFC set to  100.000000
5/4/2011	2:38:39 PM	H2 MFC set to  0.000000
5/4/2011	2:38:39 PM	BCl3 MFC set to  0.000000
5/4/2011	2:38:39 PM	PHl3 MFC set to  0.000000
5/4/2011	2:38:39 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:38:39 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:38:40 PM	Tube furnace set to 0
5/4/2011	2:39:40 PM	Helium valve closed
5/4/2011	2:39:40 PM	H2 valve closed
5/4/2011	2:39:40 PM	BCl3 valve closed
5/4/2011	2:39:40 PM	PH3 valve closed
5/4/2011	2:39:40 PM	SiCl4 pre valve closed
5/4/2011	2:39:40 PM	SiCl4 post valve closed
5/4/2011	2:39:40 PM	Bubbler valve closed
5/4/2011	2:39:40 PM	Main Vac valve opened
5/4/2011	2:39:40 PM	Bypass valve opened
5/4/2011	2:39:40 PM	Helium MFC set to  0.000000
5/4/2011	2:39:40 PM	H2 MFC set to  0.000000
5/4/2011	2:39:40 PM	BCl3 MFC set to  0.000000
5/4/2011	2:39:40 PM	PHl3 MFC set to  0.000000
5/4/2011	2:39:40 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:39:40 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:39:40 PM	Tube furnace set to 0
5/4/2011	2:40:40 PM	H2 valve closed
5/4/2011	2:40:40 PM	BCl3 valve closed
5/4/2011	2:40:40 PM	PH3 valve closed
5/4/2011	2:40:40 PM	SiCl4 pre valve closed
5/4/2011	2:40:40 PM	SiCl4 post valve closed
5/4/2011	2:40:40 PM	Bubbler valve closed
5/4/2011	2:40:40 PM	Helium valve opened
5/4/2011	2:40:40 PM	Main Vac valve opened
5/4/2011	2:40:40 PM	Bypass valve opened
5/4/2011	2:40:40 PM	Helium MFC set to  100.000000
5/4/2011	2:40:40 PM	H2 MFC set to  0.000000
5/4/2011	2:40:40 PM	BCl3 MFC set to  0.000000
5/4/2011	2:40:40 PM	PHl3 MFC set to  0.000000
5/4/2011	2:40:40 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:40:40 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:40:40 PM	Tube furnace set to 0
5/4/2011	2:41:40 PM	Helium valve closed
5/4/2011	2:41:40 PM	H2 valve closed
5/4/2011	2:41:40 PM	BCl3 valve closed
5/4/2011	2:41:40 PM	PH3 valve closed
5/4/2011	2:41:40 PM	SiCl4 pre valve closed
5/4/2011	2:41:40 PM	SiCl4 post valve closed
5/4/2011	2:41:40 PM	Bubbler valve closed
5/4/2011	2:41:40 PM	Main Vac valve opened
5/4/2011	2:41:40 PM	Bypass valve opened
5/4/2011	2:41:40 PM	Helium MFC set to  0.000000
5/4/2011	2:41:40 PM	H2 MFC set to  0.000000
5/4/2011	2:41:40 PM	BCl3 MFC set to  0.000000
5/4/2011	2:41:40 PM	PHl3 MFC set to  0.000000
5/4/2011	2:41:40 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:41:40 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:41:40 PM	Tube furnace set to 0
5/4/2011	2:42:40 PM	H2 valve closed
5/4/2011	2:42:40 PM	BCl3 valve closed
5/4/2011	2:42:40 PM	PH3 valve closed
5/4/2011	2:42:40 PM	SiCl4 pre valve closed
5/4/2011	2:42:40 PM	SiCl4 post valve closed
5/4/2011	2:42:40 PM	Bubbler valve closed
5/4/2011	2:42:40 PM	Helium valve opened
5/4/2011	2:42:40 PM	Main Vac valve opened
5/4/2011	2:42:40 PM	Bypass valve opened
5/4/2011	2:42:40 PM	Helium MFC set to  100.000000
5/4/2011	2:42:40 PM	H2 MFC set to  0.000000
5/4/2011	2:42:40 PM	BCl3 MFC set to  0.000000
5/4/2011	2:42:40 PM	PHl3 MFC set to  0.000000
5/4/2011	2:42:40 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:42:40 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:42:40 PM	Tube furnace set to 0
5/4/2011	2:43:40 PM	Helium valve closed
5/4/2011	2:43:40 PM	H2 valve closed
5/4/2011	2:43:40 PM	BCl3 valve closed
5/4/2011	2:43:40 PM	PH3 valve closed
5/4/2011	2:43:40 PM	SiCl4 pre valve closed
5/4/2011	2:43:40 PM	SiCl4 post valve closed
5/4/2011	2:43:40 PM	Bubbler valve closed
5/4/2011	2:43:40 PM	Main Vac valve opened
5/4/2011	2:43:40 PM	Bypass valve opened
5/4/2011	2:43:40 PM	Helium MFC set to  0.000000
5/4/2011	2:43:40 PM	H2 MFC set to  0.000000
5/4/2011	2:43:40 PM	BCl3 MFC set to  0.000000
5/4/2011	2:43:40 PM	PHl3 MFC set to  0.000000
5/4/2011	2:43:40 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:43:40 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:43:41 PM	Tube furnace set to 0
5/4/2011	2:44:41 PM	H2 valve closed
5/4/2011	2:44:41 PM	BCl3 valve closed
5/4/2011	2:44:41 PM	PH3 valve closed
5/4/2011	2:44:41 PM	SiCl4 pre valve closed
5/4/2011	2:44:41 PM	SiCl4 post valve closed
5/4/2011	2:44:41 PM	Bubbler valve closed
5/4/2011	2:44:41 PM	Helium valve opened
5/4/2011	2:44:41 PM	Main Vac valve opened
5/4/2011	2:44:41 PM	Bypass valve opened
5/4/2011	2:44:41 PM	Helium MFC set to  100.000000
5/4/2011	2:44:41 PM	H2 MFC set to  0.000000
5/4/2011	2:44:41 PM	BCl3 MFC set to  0.000000
5/4/2011	2:44:41 PM	PHl3 MFC set to  0.000000
5/4/2011	2:44:41 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:44:41 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:44:41 PM	Tube furnace set to 0
5/4/2011	2:45:41 PM	Helium valve closed
5/4/2011	2:45:41 PM	H2 valve closed
5/4/2011	2:45:41 PM	BCl3 valve closed
5/4/2011	2:45:41 PM	PH3 valve closed
5/4/2011	2:45:41 PM	SiCl4 pre valve closed
5/4/2011	2:45:41 PM	SiCl4 post valve closed
5/4/2011	2:45:41 PM	Bubbler valve closed
5/4/2011	2:45:41 PM	Main Vac valve opened
5/4/2011	2:45:41 PM	Bypass valve opened
5/4/2011	2:45:41 PM	Helium MFC set to  0.000000
5/4/2011	2:45:41 PM	H2 MFC set to  0.000000
5/4/2011	2:45:41 PM	BCl3 MFC set to  0.000000
5/4/2011	2:45:41 PM	PHl3 MFC set to  0.000000
5/4/2011	2:45:41 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:45:41 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:45:41 PM	Tube furnace set to 0
5/4/2011	2:46:41 PM	H2 valve closed
5/4/2011	2:46:41 PM	BCl3 valve closed
5/4/2011	2:46:41 PM	PH3 valve closed
5/4/2011	2:46:41 PM	SiCl4 pre valve closed
5/4/2011	2:46:41 PM	SiCl4 post valve closed
5/4/2011	2:46:41 PM	Bubbler valve closed
5/4/2011	2:46:41 PM	Helium valve opened
5/4/2011	2:46:41 PM	Main Vac valve opened
5/4/2011	2:46:41 PM	Bypass valve opened
5/4/2011	2:46:41 PM	Helium MFC set to  100.000000
5/4/2011	2:46:41 PM	H2 MFC set to  0.000000
5/4/2011	2:46:41 PM	BCl3 MFC set to  0.000000
5/4/2011	2:46:41 PM	PHl3 MFC set to  0.000000
5/4/2011	2:46:41 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:46:41 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:46:41 PM	Tube furnace set to 0
5/4/2011	2:47:41 PM	Helium valve closed
5/4/2011	2:47:41 PM	H2 valve closed
5/4/2011	2:47:41 PM	BCl3 valve closed
5/4/2011	2:47:41 PM	PH3 valve closed
5/4/2011	2:47:41 PM	SiCl4 pre valve closed
5/4/2011	2:47:41 PM	SiCl4 post valve closed
5/4/2011	2:47:41 PM	Bubbler valve closed
5/4/2011	2:47:41 PM	Main Vac valve opened
5/4/2011	2:47:41 PM	Bypass valve opened
5/4/2011	2:47:41 PM	Helium MFC set to  0.000000
5/4/2011	2:47:41 PM	H2 MFC set to  0.000000
5/4/2011	2:47:41 PM	BCl3 MFC set to  0.000000
5/4/2011	2:47:41 PM	PHl3 MFC set to  0.000000
5/4/2011	2:47:41 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:47:41 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:47:41 PM	Tube furnace set to 0
5/4/2011	2:48:41 PM	H2 valve closed
5/4/2011	2:48:41 PM	BCl3 valve closed
5/4/2011	2:48:41 PM	PH3 valve closed
5/4/2011	2:48:41 PM	SiCl4 pre valve closed
5/4/2011	2:48:41 PM	SiCl4 post valve closed
5/4/2011	2:48:41 PM	Bubbler valve closed
5/4/2011	2:48:41 PM	Helium valve opened
5/4/2011	2:48:41 PM	Main Vac valve opened
5/4/2011	2:48:41 PM	Bypass valve opened
5/4/2011	2:48:41 PM	Helium MFC set to  100.000000
5/4/2011	2:48:41 PM	H2 MFC set to  0.000000
5/4/2011	2:48:41 PM	BCl3 MFC set to  0.000000
5/4/2011	2:48:41 PM	PHl3 MFC set to  0.000000
5/4/2011	2:48:41 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:48:41 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:48:42 PM	Tube furnace set to 0
5/4/2011	2:49:42 PM	Helium valve closed
5/4/2011	2:49:42 PM	H2 valve closed
5/4/2011	2:49:42 PM	BCl3 valve closed
5/4/2011	2:49:42 PM	PH3 valve closed
5/4/2011	2:49:42 PM	SiCl4 pre valve closed
5/4/2011	2:49:42 PM	SiCl4 post valve closed
5/4/2011	2:49:42 PM	Bubbler valve closed
5/4/2011	2:49:42 PM	Main Vac valve opened
5/4/2011	2:49:42 PM	Bypass valve opened
5/4/2011	2:49:42 PM	Helium MFC set to  0.000000
5/4/2011	2:49:42 PM	H2 MFC set to  0.000000
5/4/2011	2:49:42 PM	BCl3 MFC set to  0.000000
5/4/2011	2:49:42 PM	PHl3 MFC set to  0.000000
5/4/2011	2:49:42 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:49:42 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:49:42 PM	Tube furnace set to 0
5/4/2011	2:50:42 PM	H2 valve closed
5/4/2011	2:50:42 PM	BCl3 valve closed
5/4/2011	2:50:42 PM	PH3 valve closed
5/4/2011	2:50:42 PM	SiCl4 pre valve closed
5/4/2011	2:50:42 PM	SiCl4 post valve closed
5/4/2011	2:50:42 PM	Bubbler valve closed
5/4/2011	2:50:42 PM	Helium valve opened
5/4/2011	2:50:42 PM	Main Vac valve opened
5/4/2011	2:50:42 PM	Bypass valve opened
5/4/2011	2:50:42 PM	Helium MFC set to  100.000000
5/4/2011	2:50:42 PM	H2 MFC set to  0.000000
5/4/2011	2:50:42 PM	BCl3 MFC set to  0.000000
5/4/2011	2:50:42 PM	PHl3 MFC set to  0.000000
5/4/2011	2:50:42 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:50:42 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:50:42 PM	Tube furnace set to 0
5/4/2011	2:51:42 PM	Helium valve closed
5/4/2011	2:51:42 PM	H2 valve closed
5/4/2011	2:51:42 PM	BCl3 valve closed
5/4/2011	2:51:42 PM	PH3 valve closed
5/4/2011	2:51:42 PM	SiCl4 pre valve closed
5/4/2011	2:51:42 PM	SiCl4 post valve closed
5/4/2011	2:51:42 PM	Bubbler valve closed
5/4/2011	2:51:42 PM	Main Vac valve opened
5/4/2011	2:51:42 PM	Bypass valve opened
5/4/2011	2:51:42 PM	Helium MFC set to  0.000000
5/4/2011	2:51:42 PM	H2 MFC set to  0.000000
5/4/2011	2:51:42 PM	BCl3 MFC set to  0.000000
5/4/2011	2:51:42 PM	PHl3 MFC set to  0.000000
5/4/2011	2:51:42 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:51:42 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:51:42 PM	Tube furnace set to 0
5/4/2011	2:52:42 PM	H2 valve closed
5/4/2011	2:52:42 PM	BCl3 valve closed
5/4/2011	2:52:42 PM	PH3 valve closed
5/4/2011	2:52:42 PM	SiCl4 pre valve closed
5/4/2011	2:52:42 PM	SiCl4 post valve closed
5/4/2011	2:52:42 PM	Bubbler valve closed
5/4/2011	2:52:42 PM	Helium valve opened
5/4/2011	2:52:42 PM	Main Vac valve opened
5/4/2011	2:52:42 PM	Bypass valve opened
5/4/2011	2:52:42 PM	Helium MFC set to  100.000000
5/4/2011	2:52:42 PM	H2 MFC set to  0.000000
5/4/2011	2:52:42 PM	BCl3 MFC set to  0.000000
5/4/2011	2:52:42 PM	PHl3 MFC set to  0.000000
5/4/2011	2:52:42 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:52:42 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:52:42 PM	Tube furnace set to 0
5/4/2011	2:53:42 PM	Helium valve closed
5/4/2011	2:53:42 PM	H2 valve closed
5/4/2011	2:53:42 PM	BCl3 valve closed
5/4/2011	2:53:42 PM	PH3 valve closed
5/4/2011	2:53:42 PM	SiCl4 pre valve closed
5/4/2011	2:53:42 PM	SiCl4 post valve closed
5/4/2011	2:53:42 PM	Bubbler valve closed
5/4/2011	2:53:42 PM	Main Vac valve opened
5/4/2011	2:53:42 PM	Bypass valve opened
5/4/2011	2:53:42 PM	Helium MFC set to  0.000000
5/4/2011	2:53:42 PM	H2 MFC set to  0.000000
5/4/2011	2:53:42 PM	BCl3 MFC set to  0.000000
5/4/2011	2:53:42 PM	PHl3 MFC set to  0.000000
5/4/2011	2:53:42 PM	SiCl4 MFC set to  0.000000
5/4/2011	2:53:42 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	2:53:43 PM	Tube furnace set to 0
5/4/2011	2:53:44 PM	Run finished at 2:53 PM
5/4/2011	2:53:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/4/2011	3:07:07 PM	Helium MFC set to  30.000000
5/4/2011	3:07:08 PM	Helium valve opened
5/4/2011	3:09:43 PM	Helium valve closed
5/4/2011	3:10:28 PM	Recipe started at 3:10 PM
5/4/2011	3:10:28 PM	Helium valve closed
5/4/2011	3:10:28 PM	BCl3 valve closed
5/4/2011	3:10:28 PM	PH3 valve closed
5/4/2011	3:10:28 PM	SiCl4 pre valve closed
5/4/2011	3:10:28 PM	SiCl4 post valve closed
5/4/2011	3:10:28 PM	Main Vac valve closed
5/4/2011	3:10:28 PM	Bypass valve closed
5/4/2011	3:10:28 PM	Bubbler valve closed
5/4/2011	3:10:28 PM	H2 valve opened
5/4/2011	3:10:28 PM	Helium MFC set to  0.000000
5/4/2011	3:10:28 PM	H2 MFC set to  500.000000
5/4/2011	3:10:28 PM	BCl3 MFC set to  0.000000
5/4/2011	3:10:28 PM	PHl3 MFC set to  0.000000
5/4/2011	3:10:28 PM	SiCl4 MFC set to  0.000000
5/4/2011	3:10:28 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	3:10:28 PM	Tube furnace set to 0
5/4/2011	3:11:50 PM	Helium valve closed
5/4/2011	3:11:50 PM	BCl3 valve closed
5/4/2011	3:11:50 PM	PH3 valve closed
5/4/2011	3:11:50 PM	SiCl4 pre valve closed
5/4/2011	3:11:50 PM	SiCl4 post valve closed
5/4/2011	3:11:50 PM	Main Vac valve closed
5/4/2011	3:11:50 PM	Bypass valve closed
5/4/2011	3:11:50 PM	H2 valve opened
5/4/2011	3:11:50 PM	Bubbler valve opened
5/4/2011	3:11:50 PM	Helium MFC set to  0.000000
5/4/2011	3:11:50 PM	H2 MFC set to  500.000000
5/4/2011	3:11:50 PM	BCl3 MFC set to  0.000000
5/4/2011	3:11:50 PM	PHl3 MFC set to  0.000000
5/4/2011	3:11:50 PM	SiCl4 MFC set to  0.000000
5/4/2011	3:11:50 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	3:11:50 PM	Tube furnace set to 1000
5/4/2011	3:31:50 PM	Helium valve closed
5/4/2011	3:31:50 PM	BCl3 valve closed
5/4/2011	3:31:50 PM	PH3 valve closed
5/4/2011	3:31:50 PM	Main Vac valve closed
5/4/2011	3:31:50 PM	Bypass valve closed
5/4/2011	3:31:50 PM	H2 valve opened
5/4/2011	3:31:50 PM	SiCl4 pre valve opened
5/4/2011	3:31:50 PM	SiCl4 post valve opened
5/4/2011	3:31:50 PM	Bubbler valve opened
5/4/2011	3:31:50 PM	Helium MFC set to  0.000000
5/4/2011	3:31:50 PM	H2 MFC set to  500.000000
5/4/2011	3:31:50 PM	BCl3 MFC set to  0.000000
5/4/2011	3:31:50 PM	PHl3 MFC set to  0.000000
5/4/2011	3:31:50 PM	SiCl4 MFC set to  99.000000
5/4/2011	3:31:50 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	3:31:50 PM	Tube furnace set to 1000
5/4/2011	3:51:50 PM	Helium valve closed
5/4/2011	3:51:50 PM	BCl3 valve closed
5/4/2011	3:51:50 PM	PH3 valve closed
5/4/2011	3:51:50 PM	SiCl4 pre valve closed
5/4/2011	3:51:50 PM	SiCl4 post valve closed
5/4/2011	3:51:50 PM	Main Vac valve closed
5/4/2011	3:51:50 PM	Bypass valve closed
5/4/2011	3:51:50 PM	H2 valve opened
5/4/2011	3:51:50 PM	Bubbler valve opened
5/4/2011	3:51:50 PM	Helium MFC set to  0.000000
5/4/2011	3:51:50 PM	H2 MFC set to  500.000000
5/4/2011	3:51:50 PM	BCl3 MFC set to  0.000000
5/4/2011	3:51:50 PM	PHl3 MFC set to  0.000000
5/4/2011	3:51:50 PM	SiCl4 MFC set to  0.000000
5/4/2011	3:51:50 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	3:51:51 PM	Tube furnace set to 0
5/4/2011	4:41:50 PM	H2 valve closed
5/4/2011	4:41:50 PM	BCl3 valve closed
5/4/2011	4:41:50 PM	PH3 valve closed
5/4/2011	4:41:50 PM	SiCl4 pre valve closed
5/4/2011	4:41:50 PM	SiCl4 post valve closed
5/4/2011	4:41:50 PM	Main Vac valve closed
5/4/2011	4:41:50 PM	Bypass valve closed
5/4/2011	4:41:50 PM	Helium valve opened
5/4/2011	4:41:50 PM	Bubbler valve opened
5/4/2011	4:41:50 PM	Helium MFC set to  500.000000
5/4/2011	4:41:50 PM	H2 MFC set to  0.000000
5/4/2011	4:41:50 PM	BCl3 MFC set to  0.000000
5/4/2011	4:41:50 PM	PHl3 MFC set to  0.000000
5/4/2011	4:41:50 PM	SiCl4 MFC set to  0.000000
5/4/2011	4:41:50 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	4:41:51 PM	Tube furnace set to 0
5/4/2011	5:07:51 PM	Helium valve closed
5/4/2011	5:07:51 PM	H2 valve closed
5/4/2011	5:07:51 PM	BCl3 valve closed
5/4/2011	5:07:51 PM	PH3 valve closed
5/4/2011	5:07:51 PM	SiCl4 pre valve closed
5/4/2011	5:07:51 PM	SiCl4 post valve closed
5/4/2011	5:07:51 PM	Main Vac valve closed
5/4/2011	5:07:51 PM	Bypass valve closed
5/4/2011	5:07:51 PM	Bubbler valve closed
5/4/2011	5:07:51 PM	Helium MFC set to  0.000000
5/4/2011	5:07:51 PM	H2 MFC set to  0.000000
5/4/2011	5:07:51 PM	BCl3 MFC set to  0.000000
5/4/2011	5:07:51 PM	PHl3 MFC set to  0.000000
5/4/2011	5:07:51 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:07:51 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:07:51 PM	Tube furnace set to 0
5/4/2011	5:07:51 PM	Run finished at 5:07 PM
5/4/2011	5:12:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/4/2011	5:12:26 PM	Recipe started at 5:12 PM
5/4/2011	5:12:26 PM	Helium valve closed
5/4/2011	5:12:26 PM	H2 valve closed
5/4/2011	5:12:26 PM	BCl3 valve closed
5/4/2011	5:12:26 PM	PH3 valve closed
5/4/2011	5:12:26 PM	SiCl4 pre valve closed
5/4/2011	5:12:26 PM	SiCl4 post valve closed
5/4/2011	5:12:26 PM	Main Vac valve closed
5/4/2011	5:12:26 PM	Bubbler valve closed
5/4/2011	5:12:26 PM	Bypass valve opened
5/4/2011	5:12:26 PM	Helium MFC set to  0.000000
5/4/2011	5:12:26 PM	H2 MFC set to  0.000000
5/4/2011	5:12:26 PM	BCl3 MFC set to  0.000000
5/4/2011	5:12:26 PM	PHl3 MFC set to  0.000000
5/4/2011	5:12:26 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:12:26 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:12:26 PM	Tube furnace set to 0
5/4/2011	5:12:58 PM	Helium valve closed
5/4/2011	5:12:58 PM	H2 valve closed
5/4/2011	5:12:58 PM	BCl3 valve closed
5/4/2011	5:12:58 PM	PH3 valve closed
5/4/2011	5:12:58 PM	SiCl4 pre valve closed
5/4/2011	5:12:58 PM	SiCl4 post valve closed
5/4/2011	5:12:58 PM	Bubbler valve closed
5/4/2011	5:12:58 PM	Main Vac valve opened
5/4/2011	5:12:58 PM	Bypass valve opened
5/4/2011	5:12:58 PM	Helium MFC set to  0.000000
5/4/2011	5:12:58 PM	H2 MFC set to  0.000000
5/4/2011	5:12:58 PM	BCl3 MFC set to  0.000000
5/4/2011	5:12:58 PM	PHl3 MFC set to  0.000000
5/4/2011	5:12:58 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:12:58 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:12:58 PM	Tube furnace set to 0
5/4/2011	5:12:58 PM	Run finished at 5:12 PM
5/4/2011	5:12:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/4/2011	5:13:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/4/2011	5:13:24 PM	Recipe started at 5:13 PM
5/4/2011	5:13:24 PM	Helium valve closed
5/4/2011	5:13:24 PM	H2 valve closed
5/4/2011	5:13:24 PM	BCl3 valve closed
5/4/2011	5:13:24 PM	PH3 valve closed
5/4/2011	5:13:24 PM	SiCl4 pre valve closed
5/4/2011	5:13:24 PM	SiCl4 post valve closed
5/4/2011	5:13:24 PM	Main Vac valve closed
5/4/2011	5:13:24 PM	Bubbler valve closed
5/4/2011	5:13:24 PM	Bypass valve opened
5/4/2011	5:13:24 PM	Helium MFC set to  0.000000
5/4/2011	5:13:24 PM	H2 MFC set to  0.000000
5/4/2011	5:13:24 PM	BCl3 MFC set to  0.000000
5/4/2011	5:13:24 PM	PHl3 MFC set to  0.000000
5/4/2011	5:13:24 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:13:24 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:13:25 PM	Tube furnace set to 0
5/4/2011	5:13:25 PM	Helium valve closed
5/4/2011	5:13:25 PM	H2 valve closed
5/4/2011	5:13:25 PM	BCl3 valve closed
5/4/2011	5:13:25 PM	PH3 valve closed
5/4/2011	5:13:25 PM	SiCl4 pre valve closed
5/4/2011	5:13:25 PM	SiCl4 post valve closed
5/4/2011	5:13:25 PM	Bubbler valve closed
5/4/2011	5:13:25 PM	Main Vac valve opened
5/4/2011	5:13:25 PM	Bypass valve opened
5/4/2011	5:13:25 PM	Helium MFC set to  0.000000
5/4/2011	5:13:25 PM	H2 MFC set to  0.000000
5/4/2011	5:13:25 PM	BCl3 MFC set to  0.000000
5/4/2011	5:13:25 PM	PHl3 MFC set to  0.000000
5/4/2011	5:13:25 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:13:25 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:13:25 PM	Tube furnace set to 0
5/4/2011	5:14:25 PM	H2 valve closed
5/4/2011	5:14:25 PM	BCl3 valve closed
5/4/2011	5:14:25 PM	PH3 valve closed
5/4/2011	5:14:25 PM	SiCl4 pre valve closed
5/4/2011	5:14:25 PM	SiCl4 post valve closed
5/4/2011	5:14:25 PM	Bubbler valve closed
5/4/2011	5:14:25 PM	Helium valve opened
5/4/2011	5:14:25 PM	Main Vac valve opened
5/4/2011	5:14:25 PM	Bypass valve opened
5/4/2011	5:14:25 PM	Helium MFC set to  100.000000
5/4/2011	5:14:25 PM	H2 MFC set to  0.000000
5/4/2011	5:14:25 PM	BCl3 MFC set to  0.000000
5/4/2011	5:14:25 PM	PHl3 MFC set to  0.000000
5/4/2011	5:14:25 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:14:25 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:14:25 PM	Tube furnace set to 0
5/4/2011	5:15:25 PM	Helium valve closed
5/4/2011	5:15:25 PM	H2 valve closed
5/4/2011	5:15:25 PM	BCl3 valve closed
5/4/2011	5:15:25 PM	PH3 valve closed
5/4/2011	5:15:25 PM	SiCl4 pre valve closed
5/4/2011	5:15:25 PM	SiCl4 post valve closed
5/4/2011	5:15:25 PM	Bubbler valve closed
5/4/2011	5:15:25 PM	Main Vac valve opened
5/4/2011	5:15:25 PM	Bypass valve opened
5/4/2011	5:15:25 PM	Helium MFC set to  0.000000
5/4/2011	5:15:25 PM	H2 MFC set to  0.000000
5/4/2011	5:15:25 PM	BCl3 MFC set to  0.000000
5/4/2011	5:15:25 PM	PHl3 MFC set to  0.000000
5/4/2011	5:15:25 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:15:25 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:15:25 PM	Tube furnace set to 0
5/4/2011	5:16:25 PM	H2 valve closed
5/4/2011	5:16:26 PM	BCl3 valve closed
5/4/2011	5:16:26 PM	PH3 valve closed
5/4/2011	5:16:26 PM	SiCl4 pre valve closed
5/4/2011	5:16:26 PM	SiCl4 post valve closed
5/4/2011	5:16:26 PM	Bubbler valve closed
5/4/2011	5:16:26 PM	Helium valve opened
5/4/2011	5:16:26 PM	Main Vac valve opened
5/4/2011	5:16:26 PM	Bypass valve opened
5/4/2011	5:16:26 PM	Helium MFC set to  100.000000
5/4/2011	5:16:26 PM	H2 MFC set to  0.000000
5/4/2011	5:16:26 PM	BCl3 MFC set to  0.000000
5/4/2011	5:16:26 PM	PHl3 MFC set to  0.000000
5/4/2011	5:16:26 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:16:26 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:16:26 PM	Tube furnace set to 0
5/4/2011	5:17:26 PM	Helium valve closed
5/4/2011	5:17:26 PM	H2 valve closed
5/4/2011	5:17:26 PM	BCl3 valve closed
5/4/2011	5:17:26 PM	PH3 valve closed
5/4/2011	5:17:26 PM	SiCl4 pre valve closed
5/4/2011	5:17:26 PM	SiCl4 post valve closed
5/4/2011	5:17:26 PM	Bubbler valve closed
5/4/2011	5:17:26 PM	Main Vac valve opened
5/4/2011	5:17:26 PM	Bypass valve opened
5/4/2011	5:17:26 PM	Helium MFC set to  0.000000
5/4/2011	5:17:26 PM	H2 MFC set to  0.000000
5/4/2011	5:17:26 PM	BCl3 MFC set to  0.000000
5/4/2011	5:17:26 PM	PHl3 MFC set to  0.000000
5/4/2011	5:17:26 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:17:26 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:17:26 PM	Tube furnace set to 0
5/4/2011	5:18:26 PM	H2 valve closed
5/4/2011	5:18:26 PM	BCl3 valve closed
5/4/2011	5:18:26 PM	PH3 valve closed
5/4/2011	5:18:26 PM	SiCl4 pre valve closed
5/4/2011	5:18:26 PM	SiCl4 post valve closed
5/4/2011	5:18:26 PM	Bubbler valve closed
5/4/2011	5:18:26 PM	Helium valve opened
5/4/2011	5:18:26 PM	Main Vac valve opened
5/4/2011	5:18:26 PM	Bypass valve opened
5/4/2011	5:18:26 PM	Helium MFC set to  100.000000
5/4/2011	5:18:26 PM	H2 MFC set to  0.000000
5/4/2011	5:18:26 PM	BCl3 MFC set to  0.000000
5/4/2011	5:18:26 PM	PHl3 MFC set to  0.000000
5/4/2011	5:18:26 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:18:26 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:18:26 PM	Tube furnace set to 0
5/4/2011	5:19:26 PM	Helium valve closed
5/4/2011	5:19:26 PM	H2 valve closed
5/4/2011	5:19:26 PM	BCl3 valve closed
5/4/2011	5:19:26 PM	PH3 valve closed
5/4/2011	5:19:26 PM	SiCl4 pre valve closed
5/4/2011	5:19:26 PM	SiCl4 post valve closed
5/4/2011	5:19:26 PM	Bubbler valve closed
5/4/2011	5:19:26 PM	Main Vac valve opened
5/4/2011	5:19:26 PM	Bypass valve opened
5/4/2011	5:19:26 PM	Helium MFC set to  0.000000
5/4/2011	5:19:26 PM	H2 MFC set to  0.000000
5/4/2011	5:19:26 PM	BCl3 MFC set to  0.000000
5/4/2011	5:19:26 PM	PHl3 MFC set to  0.000000
5/4/2011	5:19:26 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:19:26 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:19:26 PM	Tube furnace set to 0
5/4/2011	5:20:26 PM	H2 valve closed
5/4/2011	5:20:26 PM	BCl3 valve closed
5/4/2011	5:20:26 PM	PH3 valve closed
5/4/2011	5:20:26 PM	SiCl4 pre valve closed
5/4/2011	5:20:26 PM	SiCl4 post valve closed
5/4/2011	5:20:26 PM	Bubbler valve closed
5/4/2011	5:20:26 PM	Helium valve opened
5/4/2011	5:20:26 PM	Main Vac valve opened
5/4/2011	5:20:26 PM	Bypass valve opened
5/4/2011	5:20:26 PM	Helium MFC set to  100.000000
5/4/2011	5:20:26 PM	H2 MFC set to  0.000000
5/4/2011	5:20:26 PM	BCl3 MFC set to  0.000000
5/4/2011	5:20:26 PM	PHl3 MFC set to  0.000000
5/4/2011	5:20:26 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:20:26 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:20:26 PM	Tube furnace set to 0
5/4/2011	5:21:27 PM	Helium valve closed
5/4/2011	5:21:27 PM	H2 valve closed
5/4/2011	5:21:27 PM	BCl3 valve closed
5/4/2011	5:21:27 PM	PH3 valve closed
5/4/2011	5:21:27 PM	SiCl4 pre valve closed
5/4/2011	5:21:27 PM	SiCl4 post valve closed
5/4/2011	5:21:27 PM	Bubbler valve closed
5/4/2011	5:21:27 PM	Main Vac valve opened
5/4/2011	5:21:27 PM	Bypass valve opened
5/4/2011	5:21:27 PM	Helium MFC set to  0.000000
5/4/2011	5:21:27 PM	H2 MFC set to  0.000000
5/4/2011	5:21:27 PM	BCl3 MFC set to  0.000000
5/4/2011	5:21:27 PM	PHl3 MFC set to  0.000000
5/4/2011	5:21:27 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:21:27 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:21:27 PM	Tube furnace set to 0
5/4/2011	5:22:27 PM	H2 valve closed
5/4/2011	5:22:27 PM	BCl3 valve closed
5/4/2011	5:22:27 PM	PH3 valve closed
5/4/2011	5:22:27 PM	SiCl4 pre valve closed
5/4/2011	5:22:27 PM	SiCl4 post valve closed
5/4/2011	5:22:27 PM	Bubbler valve closed
5/4/2011	5:22:27 PM	Helium valve opened
5/4/2011	5:22:27 PM	Main Vac valve opened
5/4/2011	5:22:27 PM	Bypass valve opened
5/4/2011	5:22:27 PM	Helium MFC set to  100.000000
5/4/2011	5:22:27 PM	H2 MFC set to  0.000000
5/4/2011	5:22:27 PM	BCl3 MFC set to  0.000000
5/4/2011	5:22:27 PM	PHl3 MFC set to  0.000000
5/4/2011	5:22:27 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:22:27 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:22:27 PM	Tube furnace set to 0
5/4/2011	5:23:27 PM	Helium valve closed
5/4/2011	5:23:27 PM	H2 valve closed
5/4/2011	5:23:27 PM	BCl3 valve closed
5/4/2011	5:23:27 PM	PH3 valve closed
5/4/2011	5:23:27 PM	SiCl4 pre valve closed
5/4/2011	5:23:27 PM	SiCl4 post valve closed
5/4/2011	5:23:27 PM	Bubbler valve closed
5/4/2011	5:23:27 PM	Main Vac valve opened
5/4/2011	5:23:27 PM	Bypass valve opened
5/4/2011	5:23:27 PM	Helium MFC set to  0.000000
5/4/2011	5:23:27 PM	H2 MFC set to  0.000000
5/4/2011	5:23:27 PM	BCl3 MFC set to  0.000000
5/4/2011	5:23:27 PM	PHl3 MFC set to  0.000000
5/4/2011	5:23:27 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:23:27 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:23:27 PM	Tube furnace set to 0
5/4/2011	5:24:27 PM	H2 valve closed
5/4/2011	5:24:27 PM	BCl3 valve closed
5/4/2011	5:24:27 PM	PH3 valve closed
5/4/2011	5:24:27 PM	SiCl4 pre valve closed
5/4/2011	5:24:27 PM	SiCl4 post valve closed
5/4/2011	5:24:27 PM	Bubbler valve closed
5/4/2011	5:24:27 PM	Helium valve opened
5/4/2011	5:24:27 PM	Main Vac valve opened
5/4/2011	5:24:27 PM	Bypass valve opened
5/4/2011	5:24:27 PM	Helium MFC set to  100.000000
5/4/2011	5:24:27 PM	H2 MFC set to  0.000000
5/4/2011	5:24:27 PM	BCl3 MFC set to  0.000000
5/4/2011	5:24:27 PM	PHl3 MFC set to  0.000000
5/4/2011	5:24:27 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:24:27 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:24:27 PM	Tube furnace set to 0
5/4/2011	5:25:27 PM	Helium valve closed
5/4/2011	5:25:27 PM	H2 valve closed
5/4/2011	5:25:27 PM	BCl3 valve closed
5/4/2011	5:25:27 PM	PH3 valve closed
5/4/2011	5:25:27 PM	SiCl4 pre valve closed
5/4/2011	5:25:27 PM	SiCl4 post valve closed
5/4/2011	5:25:27 PM	Bubbler valve closed
5/4/2011	5:25:27 PM	Main Vac valve opened
5/4/2011	5:25:27 PM	Bypass valve opened
5/4/2011	5:25:27 PM	Helium MFC set to  0.000000
5/4/2011	5:25:27 PM	H2 MFC set to  0.000000
5/4/2011	5:25:27 PM	BCl3 MFC set to  0.000000
5/4/2011	5:25:27 PM	PHl3 MFC set to  0.000000
5/4/2011	5:25:27 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:25:27 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:25:28 PM	Tube furnace set to 0
5/4/2011	5:26:28 PM	H2 valve closed
5/4/2011	5:26:28 PM	BCl3 valve closed
5/4/2011	5:26:28 PM	PH3 valve closed
5/4/2011	5:26:28 PM	SiCl4 pre valve closed
5/4/2011	5:26:28 PM	SiCl4 post valve closed
5/4/2011	5:26:28 PM	Bubbler valve closed
5/4/2011	5:26:28 PM	Helium valve opened
5/4/2011	5:26:28 PM	Main Vac valve opened
5/4/2011	5:26:28 PM	Bypass valve opened
5/4/2011	5:26:28 PM	Helium MFC set to  100.000000
5/4/2011	5:26:28 PM	H2 MFC set to  0.000000
5/4/2011	5:26:28 PM	BCl3 MFC set to  0.000000
5/4/2011	5:26:28 PM	PHl3 MFC set to  0.000000
5/4/2011	5:26:28 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:26:28 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:26:28 PM	Tube furnace set to 0
5/4/2011	5:27:28 PM	Helium valve closed
5/4/2011	5:27:28 PM	H2 valve closed
5/4/2011	5:27:28 PM	BCl3 valve closed
5/4/2011	5:27:28 PM	PH3 valve closed
5/4/2011	5:27:28 PM	SiCl4 pre valve closed
5/4/2011	5:27:28 PM	SiCl4 post valve closed
5/4/2011	5:27:28 PM	Bubbler valve closed
5/4/2011	5:27:28 PM	Main Vac valve opened
5/4/2011	5:27:28 PM	Bypass valve opened
5/4/2011	5:27:28 PM	Helium MFC set to  0.000000
5/4/2011	5:27:28 PM	H2 MFC set to  0.000000
5/4/2011	5:27:28 PM	BCl3 MFC set to  0.000000
5/4/2011	5:27:28 PM	PHl3 MFC set to  0.000000
5/4/2011	5:27:28 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:27:28 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:27:28 PM	Tube furnace set to 0
5/4/2011	5:28:28 PM	H2 valve closed
5/4/2011	5:28:28 PM	BCl3 valve closed
5/4/2011	5:28:28 PM	PH3 valve closed
5/4/2011	5:28:28 PM	SiCl4 pre valve closed
5/4/2011	5:28:28 PM	SiCl4 post valve closed
5/4/2011	5:28:28 PM	Bubbler valve closed
5/4/2011	5:28:28 PM	Helium valve opened
5/4/2011	5:28:28 PM	Main Vac valve opened
5/4/2011	5:28:28 PM	Bypass valve opened
5/4/2011	5:28:28 PM	Helium MFC set to  100.000000
5/4/2011	5:28:28 PM	H2 MFC set to  0.000000
5/4/2011	5:28:28 PM	BCl3 MFC set to  0.000000
5/4/2011	5:28:28 PM	PHl3 MFC set to  0.000000
5/4/2011	5:28:28 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:28:28 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:28:28 PM	Tube furnace set to 0
5/4/2011	5:29:28 PM	Helium valve closed
5/4/2011	5:29:28 PM	H2 valve closed
5/4/2011	5:29:28 PM	BCl3 valve closed
5/4/2011	5:29:28 PM	PH3 valve closed
5/4/2011	5:29:28 PM	SiCl4 pre valve closed
5/4/2011	5:29:28 PM	SiCl4 post valve closed
5/4/2011	5:29:28 PM	Bubbler valve closed
5/4/2011	5:29:28 PM	Main Vac valve opened
5/4/2011	5:29:28 PM	Bypass valve opened
5/4/2011	5:29:28 PM	Helium MFC set to  0.000000
5/4/2011	5:29:28 PM	H2 MFC set to  0.000000
5/4/2011	5:29:28 PM	BCl3 MFC set to  0.000000
5/4/2011	5:29:28 PM	PHl3 MFC set to  0.000000
5/4/2011	5:29:28 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:29:28 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:29:28 PM	Tube furnace set to 0
5/4/2011	5:30:28 PM	H2 valve closed
5/4/2011	5:30:28 PM	BCl3 valve closed
5/4/2011	5:30:28 PM	PH3 valve closed
5/4/2011	5:30:28 PM	SiCl4 pre valve closed
5/4/2011	5:30:28 PM	SiCl4 post valve closed
5/4/2011	5:30:28 PM	Bubbler valve closed
5/4/2011	5:30:28 PM	Helium valve opened
5/4/2011	5:30:28 PM	Main Vac valve opened
5/4/2011	5:30:28 PM	Bypass valve opened
5/4/2011	5:30:28 PM	Helium MFC set to  100.000000
5/4/2011	5:30:28 PM	H2 MFC set to  0.000000
5/4/2011	5:30:28 PM	BCl3 MFC set to  0.000000
5/4/2011	5:30:28 PM	PHl3 MFC set to  0.000000
5/4/2011	5:30:28 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:30:28 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:30:29 PM	Tube furnace set to 0
5/4/2011	5:31:29 PM	Helium valve closed
5/4/2011	5:31:29 PM	H2 valve closed
5/4/2011	5:31:29 PM	BCl3 valve closed
5/4/2011	5:31:29 PM	PH3 valve closed
5/4/2011	5:31:29 PM	SiCl4 pre valve closed
5/4/2011	5:31:29 PM	SiCl4 post valve closed
5/4/2011	5:31:29 PM	Bubbler valve closed
5/4/2011	5:31:29 PM	Main Vac valve opened
5/4/2011	5:31:29 PM	Bypass valve opened
5/4/2011	5:31:29 PM	Helium MFC set to  0.000000
5/4/2011	5:31:29 PM	H2 MFC set to  0.000000
5/4/2011	5:31:29 PM	BCl3 MFC set to  0.000000
5/4/2011	5:31:29 PM	PHl3 MFC set to  0.000000
5/4/2011	5:31:29 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:31:29 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:31:29 PM	Tube furnace set to 0
5/4/2011	5:32:29 PM	H2 valve closed
5/4/2011	5:32:29 PM	BCl3 valve closed
5/4/2011	5:32:29 PM	PH3 valve closed
5/4/2011	5:32:29 PM	SiCl4 pre valve closed
5/4/2011	5:32:29 PM	SiCl4 post valve closed
5/4/2011	5:32:29 PM	Bubbler valve closed
5/4/2011	5:32:29 PM	Helium valve opened
5/4/2011	5:32:29 PM	Main Vac valve opened
5/4/2011	5:32:29 PM	Bypass valve opened
5/4/2011	5:32:29 PM	Helium MFC set to  100.000000
5/4/2011	5:32:29 PM	H2 MFC set to  0.000000
5/4/2011	5:32:29 PM	BCl3 MFC set to  0.000000
5/4/2011	5:32:29 PM	PHl3 MFC set to  0.000000
5/4/2011	5:32:29 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:32:29 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:32:29 PM	Tube furnace set to 0
5/4/2011	5:33:29 PM	Helium valve closed
5/4/2011	5:33:29 PM	H2 valve closed
5/4/2011	5:33:29 PM	BCl3 valve closed
5/4/2011	5:33:29 PM	PH3 valve closed
5/4/2011	5:33:29 PM	SiCl4 pre valve closed
5/4/2011	5:33:29 PM	SiCl4 post valve closed
5/4/2011	5:33:29 PM	Bubbler valve closed
5/4/2011	5:33:29 PM	Main Vac valve opened
5/4/2011	5:33:29 PM	Bypass valve opened
5/4/2011	5:33:29 PM	Helium MFC set to  0.000000
5/4/2011	5:33:29 PM	H2 MFC set to  0.000000
5/4/2011	5:33:29 PM	BCl3 MFC set to  0.000000
5/4/2011	5:33:29 PM	PHl3 MFC set to  0.000000
5/4/2011	5:33:29 PM	SiCl4 MFC set to  0.000000
5/4/2011	5:33:29 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	5:33:29 PM	Tube furnace set to 0
5/4/2011	5:33:30 PM	Run finished at 5:33 PM
5/4/2011	5:33:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/4/2011	5:42:08 PM	Helium MFC set to  20.000000
5/4/2011	5:42:09 PM	Helium valve opened
5/4/2011	6:22:36 PM	Helium valve closed
5/4/2011	6:23:46 PM	Recipe started at 6:23 PM
5/4/2011	6:23:46 PM	Helium valve closed
5/4/2011	6:23:46 PM	BCl3 valve closed
5/4/2011	6:23:46 PM	PH3 valve closed
5/4/2011	6:23:46 PM	SiCl4 pre valve closed
5/4/2011	6:23:46 PM	SiCl4 post valve closed
5/4/2011	6:23:46 PM	Main Vac valve closed
5/4/2011	6:23:46 PM	Bypass valve closed
5/4/2011	6:23:46 PM	Bubbler valve closed
5/4/2011	6:23:46 PM	H2 valve opened
5/4/2011	6:23:46 PM	Helium MFC set to  0.000000
5/4/2011	6:23:46 PM	H2 MFC set to  500.000000
5/4/2011	6:23:46 PM	BCl3 MFC set to  0.000000
5/4/2011	6:23:46 PM	PHl3 MFC set to  0.000000
5/4/2011	6:23:46 PM	SiCl4 MFC set to  0.000000
5/4/2011	6:23:46 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	6:23:46 PM	Tube furnace set to 0
5/4/2011	6:25:08 PM	Helium valve closed
5/4/2011	6:25:08 PM	BCl3 valve closed
5/4/2011	6:25:08 PM	PH3 valve closed
5/4/2011	6:25:08 PM	SiCl4 pre valve closed
5/4/2011	6:25:08 PM	SiCl4 post valve closed
5/4/2011	6:25:08 PM	Main Vac valve closed
5/4/2011	6:25:08 PM	Bypass valve closed
5/4/2011	6:25:08 PM	H2 valve opened
5/4/2011	6:25:08 PM	Bubbler valve opened
5/4/2011	6:25:08 PM	Helium MFC set to  0.000000
5/4/2011	6:25:08 PM	H2 MFC set to  500.000000
5/4/2011	6:25:08 PM	BCl3 MFC set to  0.000000
5/4/2011	6:25:08 PM	PHl3 MFC set to  0.000000
5/4/2011	6:25:08 PM	SiCl4 MFC set to  0.000000
5/4/2011	6:25:08 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	6:25:08 PM	Tube furnace set to 1000
5/4/2011	6:45:08 PM	Helium valve closed
5/4/2011	6:45:08 PM	BCl3 valve closed
5/4/2011	6:45:08 PM	PH3 valve closed
5/4/2011	6:45:08 PM	Main Vac valve closed
5/4/2011	6:45:08 PM	Bypass valve closed
5/4/2011	6:45:08 PM	H2 valve opened
5/4/2011	6:45:08 PM	SiCl4 pre valve opened
5/4/2011	6:45:08 PM	SiCl4 post valve opened
5/4/2011	6:45:08 PM	Bubbler valve opened
5/4/2011	6:45:08 PM	Helium MFC set to  0.000000
5/4/2011	6:45:08 PM	H2 MFC set to  500.000000
5/4/2011	6:45:08 PM	BCl3 MFC set to  0.000000
5/4/2011	6:45:08 PM	PHl3 MFC set to  0.000000
5/4/2011	6:45:08 PM	SiCl4 MFC set to  99.000000
5/4/2011	6:45:08 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	6:45:08 PM	Tube furnace set to 1000
5/4/2011	7:05:08 PM	Helium valve closed
5/4/2011	7:05:09 PM	BCl3 valve closed
5/4/2011	7:05:09 PM	PH3 valve closed
5/4/2011	7:05:09 PM	SiCl4 pre valve closed
5/4/2011	7:05:09 PM	SiCl4 post valve closed
5/4/2011	7:05:09 PM	Main Vac valve closed
5/4/2011	7:05:09 PM	Bypass valve closed
5/4/2011	7:05:09 PM	H2 valve opened
5/4/2011	7:05:09 PM	Bubbler valve opened
5/4/2011	7:05:09 PM	Helium MFC set to  0.000000
5/4/2011	7:05:09 PM	H2 MFC set to  500.000000
5/4/2011	7:05:09 PM	BCl3 MFC set to  0.000000
5/4/2011	7:05:09 PM	PHl3 MFC set to  0.000000
5/4/2011	7:05:09 PM	SiCl4 MFC set to  0.000000
5/4/2011	7:05:09 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	7:05:09 PM	Tube furnace set to 0
5/4/2011	7:20:06 PM	H2 valve closed
5/4/2011	7:20:06 PM	BCl3 valve closed
5/4/2011	7:20:06 PM	PH3 valve closed
5/4/2011	7:20:06 PM	SiCl4 pre valve closed
5/4/2011	7:20:06 PM	SiCl4 post valve closed
5/4/2011	7:20:06 PM	Main Vac valve closed
5/4/2011	7:20:06 PM	Bypass valve closed
5/4/2011	7:20:06 PM	Helium valve opened
5/4/2011	7:20:06 PM	Bubbler valve opened
5/4/2011	7:20:06 PM	Helium MFC set to  500.000000
5/4/2011	7:20:06 PM	H2 MFC set to  0.000000
5/4/2011	7:20:06 PM	BCl3 MFC set to  0.000000
5/4/2011	7:20:06 PM	PHl3 MFC set to  0.000000
5/4/2011	7:20:06 PM	SiCl4 MFC set to  0.000000
5/4/2011	7:20:06 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	7:20:06 PM	Tube furnace set to 0
5/4/2011	7:20:23 PM	Helium valve closed
5/4/2011	7:20:23 PM	H2 valve closed
5/4/2011	7:20:23 PM	BCl3 valve closed
5/4/2011	7:20:23 PM	PH3 valve closed
5/4/2011	7:20:23 PM	SiCl4 pre valve closed
5/4/2011	7:20:23 PM	SiCl4 post valve closed
5/4/2011	7:20:23 PM	Main Vac valve closed
5/4/2011	7:20:23 PM	Bypass valve closed
5/4/2011	7:20:23 PM	Bubbler valve closed
5/4/2011	7:20:23 PM	Helium MFC set to  0.000000
5/4/2011	7:20:23 PM	H2 MFC set to  0.000000
5/4/2011	7:20:23 PM	BCl3 MFC set to  0.000000
5/4/2011	7:20:23 PM	PHl3 MFC set to  0.000000
5/4/2011	7:20:23 PM	SiCl4 MFC set to  0.000000
5/4/2011	7:20:23 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	7:20:23 PM	Tube furnace set to 0
5/4/2011	7:20:24 PM	Run finished at 7:20 PM
5/4/2011	7:22:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/4/2011	7:22:57 PM	Recipe started at 7:22 PM
5/4/2011	7:22:57 PM	Helium valve closed
5/4/2011	7:22:57 PM	H2 valve closed
5/4/2011	7:22:57 PM	BCl3 valve closed
5/4/2011	7:22:57 PM	PH3 valve closed
5/4/2011	7:22:57 PM	SiCl4 pre valve closed
5/4/2011	7:22:57 PM	SiCl4 post valve closed
5/4/2011	7:22:57 PM	Main Vac valve closed
5/4/2011	7:22:57 PM	Bubbler valve closed
5/4/2011	7:22:57 PM	Bypass valve opened
5/4/2011	7:22:57 PM	Helium MFC set to  0.000000
5/4/2011	7:22:57 PM	H2 MFC set to  0.000000
5/4/2011	7:22:57 PM	BCl3 MFC set to  0.000000
5/4/2011	7:22:57 PM	PHl3 MFC set to  0.000000
5/4/2011	7:22:57 PM	SiCl4 MFC set to  0.000000
5/4/2011	7:22:57 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	7:22:57 PM	Tube furnace set to 0
5/4/2011	7:23:27 PM	Helium valve closed
5/4/2011	7:23:27 PM	H2 valve closed
5/4/2011	7:23:27 PM	BCl3 valve closed
5/4/2011	7:23:27 PM	PH3 valve closed
5/4/2011	7:23:27 PM	SiCl4 pre valve closed
5/4/2011	7:23:27 PM	SiCl4 post valve closed
5/4/2011	7:23:27 PM	Bubbler valve closed
5/4/2011	7:23:27 PM	Main Vac valve opened
5/4/2011	7:23:27 PM	Bypass valve opened
5/4/2011	7:23:27 PM	Helium MFC set to  0.000000
5/4/2011	7:23:27 PM	H2 MFC set to  0.000000
5/4/2011	7:23:27 PM	BCl3 MFC set to  0.000000
5/4/2011	7:23:27 PM	PHl3 MFC set to  0.000000
5/4/2011	7:23:27 PM	SiCl4 MFC set to  0.000000
5/4/2011	7:23:27 PM	Bypass solenoid MFC set to  0.000000
5/4/2011	7:23:27 PM	Tube furnace set to 0
5/4/2011	7:23:27 PM	Run finished at 7:23 PM
5/4/2011	7:23:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/4/2011	7:23:35 PM	Helium MFC set to  10.000000
5/4/2011	7:23:42 PM	Helium valve opened
5/4/2011	7:23:45 PM	Helium valve closed
5/4/2011	7:23:51 PM	Helium valve opened
5/4/2011	9:25:57 PM	Helium valve closed
